Apparatus, system and method for energy spread ion beam

Patent metadata

Field	Value
Publication number	US-11569063-B2
Application number	US-202117221033-A
Country	US
Kind code	B2
Filing date	Apr 2, 2021
Priority date	Apr 2, 2021
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

An ion implanter may include an ion source, arranged to generate a continuous ion beam, a DC acceleration system, to accelerate the continuous ion beam, as well as an AC linear accelerator to receive the continuous ion beam and to output a bunched ion beam. The ion implanter may also include an energy spreading electrode assembly, to receive the bunched ion beam and to apply an RF voltage between a plurality of electrodes of the energy spreading electrode assembly, along a local direction of propagation of the bunched ion beam.

First claim

The invention claimed is:

1. An ion implanter, comprising:
an ion source, arranged to generate a continuous ion beam;
a DC acceleration system to accelerate the continuous ion beam;
an AC linear accelerator to receive the continuous ion beam and to output a bunched ion beam;
an energy spreading electrode assembly, to receive the bunched ion beam and to apply an RF voltage between a plurality of electrodes of the energy spreading electrode assembly, along a local direction of propagation of the bunched ion beam; and
at least one additional component, disposed between the AC linear accelerator and the energy spreading electrode assembly, the at least one additional component to shape, collimate, filter, or scan the bunched ion beam.

2. The ion implanter of claim 1 , the bunched ion beam being bunched at a bunch frequency, further comprising an RF power supply to output an RF signal to the energy spreading electrode assembly at a spreading frequency, equal to the bunching frequency.

3. The ion implanter of claim 1 , comprising a detector to measure a phase of the bunched ion beam at an entrance to the energy spreading electrode assembly.

4. The ion implanter of claim 1 , further comprising a controller to maintain a constant phase relationship between an RF signal that is output to the energy spreading electrode assembly and a phase of the bunched ion beam.

5. The ion implanter of claim 1 , wherein the bunched ion beam is driven at a bunching frequency, wherein the energy spreading electrode assembly is arranged to receive the bunched ion beam as a pencil beam, and wherein the energy spreading electrode assembly is driven at a spreading frequency, equal to the bunching frequency.

6. The ion implanter of claim 1 , further comprising:
a scanner, arranged to receive the bunched ion beam, propagating along a first direction, and to scan the bunched ion beam along a second direction, perpendicular to the first direction; and
a collimator, disposed downstream to the scanner, to receive the bunched ion beam, and output the bunched ion beam to the energy spreading electrode assembly as a bunched ribbon beam.

7. The ion implanter of claim 6 , the energy spreading electrode assembly comprising a plurality of hollow conductive cylinders, arranged with an elongated cross-section to encompass the bunched ribbon beam.

8. The ion implanter of claim 6 , wherein the bunched ribbon beam is elongated along a lateral direction, perpendicular to the local direction of propagation, wherein the energy spreading electrode assembly is arranged to apply a uniform energy spread to the bunched ribbon beam across a width of the bunched ribbon beam along the lateral direction.

9. The ion implanter of claim 4 , further comprising:
a scanner, arranged to receive the bunched ion beam, propagating along a first direction, and to scan the bunched ion beam along a second direction, perpendicular to the first direction,
wherein the scanner generates the bunched ion beam as a bunched ribbon beam, and
wherein the controller is arranged to maintain the constant phase relationship by determining an instantaneous scan position of the bunched ribbon beam.

10. An ion implanter, comprising:
an ion source to generate an ion beam as a continuous ion beam;
a linear accelerator to bunch the continuous ion beam and output the continuous ion beam as a bunched ion beam;
a scanner, arranged to receive the bunched ion beam, propagating along a first direction, and to scan the bunched ion beam along a second direction, perpendicular to the first direction;
a collimator, disposed downstream to the scanner, to receive the bunched ion beam, and output the bunched ion beam as a ribbon beam; and
an energy spreading electrode assembly, disposed downstream to the scanner, and arranged to apply an AC voltage between a plurality of electrodes of the energy spreading electrode assembly, along a local direction of propagation of the ribbon beam.

11. The ion implanter of claim 10 , the energy spreading electrode assembly comprising a plurality of hollow conductive cylinders, arranged with an elongated cross-section to encompass the ribbon beam.

12. The ion implanter of claim 10 , the bunched ion beam being bunched at a bunch frequency, further comprising an RF power supply to output an RF signal to the energy spreading electrode assembly at a spreading frequency, equal to the bunching frequency.

13. The ion implanter of claim 10 , wherein the ribbon beam is elongated along a lateral direction, perpendicular to a local direction of propagation, wherein the energy spreading electrode assembly is arranged to apply a uniform energy spread to the bunched ribbon beam across a width of the bunched ribbon beam along the lateral direction.

14. The ion implanter of claim 10 , wherein the energy spreading electrode assembly comprises a diode set.

15. A beam conditioning apparatus, comprising:
a scanner, arranged to receive a bunched ion beam, propagating along a first direction, and to scan the bunched ion beam along a second direction, perpendicular to the first direction;
a collimator, disposed downstream to the scanner, to receive the bunched ion beam, and output the bunched ion beam as a ribbon beam;
an energy spreading electrode assembly, disposed downstream to the collimator, and arranged to apply an AC voltage between a plurality of electrodes of the energy spreading electrode assembly, along a local direction of propagation of the ribbon beam; and
a controller, arranged to control the scanner and the energy spreading electrode assembly to generate a uniform energy spreading of the ribbon beam, across a width of the ribbon beam, along a direction, perpendicular to the local direction of propagation of the ribbon beam.

16. The beam conditioning apparatus of claim 15 , the energy spreading electrode assembly comprising a plurality of hollow conductive cylinders, arranged with an elongated cross-section to encompass the ribbon beam.

17. The beam conditioning apparatus of claim 15 , the bunched ion beam being bunched at a bunch frequency, further comprising an RF power supply to output an RF signal to the energy spreading electrode assembly at a spreading frequency, equal to the bunching frequency.

18. The beam conditioning apparatus of claim 15 , the controller being arranged to maintain a constant phase relationship between an RF signal that is output to the energy spreading electrode assembly and a phase of the ribbon beam.

19. The beam conditioning apparatus of claim 18 , comprising a detector to measure the phase of the ribbon beam at an entrance to the energy spreading electrode assembly.

20. The beam conditioning apparatus of claim 18 , the controller to maintain the constant phase relationship by determining an instantaneous scan position of the ribbon beam.

Assignees

• Applied Materials Inc

Inventors

• Murphy Paul J
• Sinclair Frank
• Lu Jun
• Tieger Daniel
• Renau Anthony

Classifications

• H10P30/20

  into semiconductor materials, e.g. for doping · CPC title

• H01J37/3171 Primary

  for ion implantation · CPC title

• H01J37/05

  Electron or ion-optical arrangements for separating electrons or ions according to their energy {or mass}(particle separator tubes H01J49/00) · CPC title

• H01J37/304

  Controlling tubes by information coming from the objects {or from the beam}, e.g. correction signals · CPC title

• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title