Active workpiece heating or cooling for an ion implantation system
US-2021366746-A1 · Nov 25, 2021 · US
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Terry Brian patents
Terry Brian is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Terry Brian |
| Total patents | 9 |
| First publication | Dec 31, 2015 |
| Latest publication | Nov 25, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment
US-10794694-B2 · Oct 6, 2020 · US
Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment
US-2019120617-A1 · Apr 25, 2019 · US
Wafer temperature control with consideration to beam power input
US-10128084-B1 · Nov 13, 2018 · US
Active workpiece heating or cooling for an ion implantation system
US-2018197761-A1 · Jul 12, 2018 · US
High throughput cooled ion implantation system and method
US-9607803-B2 · Mar 28, 2017 · US
High throughput cooled ion implantation system and method
US-2017040141-A1 · Feb 9, 2017 · US
High throughput heated ion implantation system and method
US-9378992-B2 · Jun 28, 2016 · US
High throughput heated ion implantation system and method
US-2015380285-A1 · Dec 31, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Axcelis Tech Inc | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3171 | 7 |
| H10P72/0471 | 6 |
| H10P72/0434 | 6 |
| H01J37/20 | 5 |
| H01J37/185 | 5 |