Apparatus and method for controlling a substrate temperature
US-12424421-B2 · Sep 23, 2025 · US
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Tatsumi Arata patents
Tatsumi Arata is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tatsumi Arata |
| Total patents | 17 |
| First publication | Dec 20, 2018 |
| Latest publication | Sep 23, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Heater and stage having the heater
US-12284731-B2 · Apr 22, 2025 · US
Stage, film-forming apparatus, and film-processing apparatus
US-12211710-B2 · Jan 28, 2025 · US
Temperature sensor and heater unit
US-12000737-B2 · Jun 4, 2024 · US
Heater unit
US-11490464-B2 · Nov 1, 2022 · US
Sheath heater
US-11477858-B2 · Oct 18, 2022 · US
Temperature sensor and heater unit
US-2022155156-A1 · May 19, 2022 · US
Stage, film-forming apparatus or film-processing apparatus including the stage, and method for controlling temperature of substrate
US-2022157579-A1 · May 19, 2022 · US
Heater
US-2022151031-A1 · May 12, 2022 · US
Substrate supporting unit and film forming device having the substrate supporting unit
US-11201040-B2 · Dec 14, 2021 · US
Recent patents
Latest publications not already listed above.
Heater and stage having the heater
US-2021235550-A1 · Jul 29, 2021 · US
Stage, film-forming apparatus, and film-processing apparatus
US-2021217638-A1 · Jul 15, 2021 · US
Caulking jig and manufacturing method using same
US-11052455-B2 · Jul 6, 2021 · US
Heater unit
US-2020043638-A1 · Feb 6, 2020 · US
Sheath heater
US-2020045779-A1 · Feb 6, 2020 · US
Substrate supporting unit and film forming device having the substrate supporting unit
US-2019385827-A1 · Dec 19, 2019 · US
Caulking jig and manufacturing method using same
US-2018361464-A1 · Dec 20, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Nhk Spring Co Ltd | 17 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0432 | 13 |
| C23C16/4586 | 9 |
| C23C14/50 | 9 |
| H05B3/48 | 9 |
| H01J37/32724 | 8 |