Caulking jig and manufacturing method using same

Patent metadata

Field	Value
Publication number	US-2018361464-A1
Application number	US-201816109372-A
Country	US
Kind code	A1
Filing date	Aug 22, 2018
Priority date	Feb 24, 2016
Publication date	Dec 20, 2018
Grant date	—

Abstract

A caulking jig comprises a main body, a blade portion having a blade edge, a projection member fit in the main body, an urging member which urges the projection member, and an engagement mechanism configured to engage the projection member to the main body. In a state in which the projection member is not engaged, the projection member is held at a projected position where a distal end portion of the projection member is projected from the blade edge. In a state in which the projection member is engaged, the projection member is held at an entered position where the distal end portion is retracted to a more entered position than the blade edge.

First claim

What is claimed is:

1 . A caulking jig which plastically deforms an edge portion of a hole formed in a flat upper surface of a metallic plate member, in order to fix a spacer member accommodated in the hole to a position which allows an upper end portion of the spacer member to be projected from the upper surface by a predetermined height, the caulking jig comprising:
a cylindrical main body; a blade portion provided at a distal end of the main body, and having a sharp V-shaped blade edge; a projection member internally fit in the main body; an urging member which urges the projection member in a direction of projecting the projection member from the blade portion; and an engagement mechanism configured to engage the projection member to the main body, wherein in a state in which the projection member is not engaged by the engagement mechanism, the projection member is held at a projected position where a distal end portion of the projection member is projected from the blade edge by urging force of the urging member; and in a state in which the projection member is engaged by the engagement mechanism, the projection member is held at an entered position where the distal end portion is retracted to a more entered position than the blade edge against the urging force of the urging member.

2 . The caulking jig of claim 1 , wherein the projection member further includes a shoulder portion formed to have a diameter larger than a diameter of the distal end portion, and
the engagement mechanism includes: an engagement hole which is formed in the main body, is positioned on a plane orthogonal to a central axis of the main body, and penetrates the main body at a position of a chord not intersecting the central axis; and an engagement pin which is inserted in the engagement hole, and contacts the shoulder portion of the projection member from a side opposite to a direction in which the urging member urges the projection member.

3 . The caulking jig of claim 1 , wherein the distal end portion of the projection member is formed to be recessed toward a proximal end.

4 . The caulking jig of claim 1 , further comprising a load sensor which measures a load exerted on the projection member against the urging force of the urging member, wherein
the load sensor is configured to detect whether the projection member is in contact with the spacer member.

5 . The caulking jig of claim 1 , further comprising a vacuum source connected to the projection member, wherein
the projection member includes a through-hole penetrated from a distal end to a proximal end; and the vacuum source causes the spacer member to be adsorbed to the distal end portion through the through-hole.

6 . The caulking jig of claim 5 , further comprising a vacuum sensor which measures a degree of vacuum of the through-hole, wherein
the vacuum sensor is configured to detect whether the spacer member is adsorbed to the distal end portion.

7 . The caulking jig of claim 1 , further comprising an optical sensor connected to the projection member, wherein
the projection member includes a through-hole penetrated from a distal end to a proximal end; and the optical sensor is configured to detect whether the spacer member is arranged on an extension of the distal end portion by measuring a reflectivity through the through-hole.

8 . A method of manufacturing a substrate supporting apparatus comprising:
forming a plurality of holes in a flat upper surface of a metallic plate member; inserting spacer members into the plurality of holes, respectively; mounting a caulking jig, which comprises a blade portion, and a projection member urged in a direction of being projected from the blade portion, on an NC machine tool; calibrating a height of the blade portion in order to input a setting of a predetermined caulking position to the NC machine tool, while holding the projection member in such a state that the projection member is retracted to a more entered position than the blade portion; lowering the caulking jig in a state in which the projection member is projected from the blade portion, pressing the spacer member by the projection member, and causing the spacer member to contact a bottom of the hole; and further lowering the blade portion to the caulking position against urging force of the projection member, and fixing the spacer member by plastically deforming an edge portion of the hole by the blade portion.

9 . The method of manufacturing the substrate supporting apparatus of claim 8 , further comprising detecting whether or not the spacer member is accommodated in the hole, wherein
when the spacer member is not accommodated in the hole, the lowering of the caulking jig is suspended.

Assignees

• Nhk Spring Co Ltd

Inventors

• Hirano Satoshi
• Tatsumi Arata
• Nanbu Takatoshi

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/7614 Primary

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/70

  for supporting or gripping · CPC title