Capacitive sensing data integration for plasma chamber condition monitoring
US-12537179-B2 · Jan 27, 2026 · US
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Tae Patrick John patents
Tae Patrick John is listed as an inventor on 19 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tae Patrick John |
| Total patents | 19 |
| First publication | Sep 19, 2019 |
| Latest publication | Jan 27, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
US-2026011539-A1 · Jan 8, 2026 · US
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
US-12437979-B2 · Oct 7, 2025 · US
Capacitive sensor housing for chamber condition monitoring
US-12163911-B2 · Dec 10, 2024 · US
Sensors and system for in-situ edge ring erosion monitor
US-2024321610-A1 · Sep 26, 2024 · US
Sensors and system for in-situ edge ring erosion monitor
US-12009236-B2 · Jun 11, 2024 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-2023343568-A2 · Oct 26, 2023 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-2023103165-A1 · Mar 30, 2023 · US
Capacitive sensor for chamber condition monitoring
US-11581206-B2 · Feb 14, 2023 · US
Resonant process monitor
US-11551905-B2 · Jan 10, 2023 · US
Recent patents
Latest publications not already listed above.
Capacitive sensing data integration for plasma chamber condition monitoring
US-11545346-B2 · Jan 3, 2023 · US
Capacitive sensor housing for chamber condition monitoring
US-2022341867-A1 · Oct 27, 2022 · US
Capacitive sensor housing for chamber condition monitoring
US-11415538-B2 · Aug 16, 2022 · US
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
US-2021280399-A1 · Sep 9, 2021 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-2021280400-A1 · Sep 9, 2021 · US
Capacitive sensor housing for chamber condition monitoring
US-2021278360-A1 · Sep 9, 2021 · US
Capacitive sensor for chamber condition monitoring
US-2021280443-A1 · Sep 9, 2021 · US
Sensors and system for in-situ edge ring erosion monitor
US-2020335368-A1 · Oct 22, 2020 · US
Resonant process monitor
US-2019287758-A1 · Sep 19, 2019 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 19 |
| Intel Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32935 | 13 |
| G01N27/228 | 11 |
| H01J2237/24564 | 8 |
| H10P72/0604 | 8 |
| H01J2237/24592 | 7 |