High-rate CMP polishing method
US-10857647-B2 · Dec 8, 2020 · US
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Stack Jeffrey Robert patents
Stack Jeffrey Robert is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Stack Jeffrey Robert |
| Total patents | 17 |
| First publication | Oct 31, 2017 |
| Latest publication | Dec 8, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Controlled residence CMP polishing method
US-10861702-B2 · Dec 8, 2020 · US
Trapezoidal CMP groove pattern
US-10857648-B2 · Dec 8, 2020 · US
Biased pulse cmp groove pattern
US-2020381258-A1 · Dec 3, 2020 · US
Biased pulse CMP groove pattern
US-10777418-B2 · Sep 15, 2020 · US
Uniform CMP polishing method
US-10586708-B2 · Mar 10, 2020 · US
Gelling reduction tool for grooving chemical mechanical planarization polishing pads
US-2019381575-A1 · Dec 19, 2019 · US
High-rate cmp polishing method
US-2018361532-A1 · Dec 20, 2018 · US
Uniform cmp polishing method
US-2018366331-A1 · Dec 20, 2018 · US
Biased pulse cmp groove pattern
US-2018366333-A1 · Dec 20, 2018 · US
Recent patents
Latest publications not already listed above.
Trapezoidal cmp groove pattern
US-2018361533-A1 · Dec 20, 2018 · US
Controlled residence cmp polishing method
US-2018366332-A1 · Dec 20, 2018 · US
Gelling reduction tool for grooving chemical mechanical planarization polishing pads
US-2018281076-A1 · Oct 4, 2018 · US
Methods for making chemical mechanical planarization (cmp) polishing pads having integral windows
US-2018169827-A1 · Jun 21, 2018 · US
Apparatus for shaping the surface of chemical mechanical polishing pads
US-2018085891-A1 · Mar 29, 2018 · US
Chemical mechanical polishing pads having a consistent pad surface microtexture
US-2018085888-A1 · Mar 29, 2018 · US
Method to shape the surface of chemical mechanical polishing pads
US-9802293-B1 · Oct 31, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Rohm & Haas Elect Materials Cmp Holdings Inc | 16 |
| Rohm And Haas Electronic Mat Cmp Holdings | 3 |
| Rohm And Haas Electronic Mat Cmp Holdings I | 1 |
| Rohm & Haas Elect Materials Cmp Holdings Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B24B37/26 | 16 |
| H10P95/04 | 11 |
| H10P95/06 | 11 |
| H10P52/00 | 11 |
| H10P95/062 | 9 |