Method for manufacturing componment and component
US-2025191887-A1 · Jun 12, 2025 · US
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Son Ryou patents
Son Ryou is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Son Ryou |
| Total patents | 10 |
| First publication | Aug 6, 2015 |
| Latest publication | Jun 12, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate support pedestal and plasma processing apparatus
US-2021104385-A1 · Apr 8, 2021 · US
Plasma processing apparatus
US-10971341-B2 · Apr 6, 2021 · US
Substrate processing apparatus
US-2021005477-A1 · Jan 7, 2021 · US
Plasma generation unit and method of discriminating state of physical quantity which is used for plasma generation
US-2020294766-A1 · Sep 17, 2020 · US
Plasma processing apparatus
US-10504698-B2 · Dec 10, 2019 · US
Plasma processing apparatus
US-2019088454-A1 · Mar 21, 2019 · US
Temperature measuring method and plasma processing system
US-9412565-B2 · Aug 9, 2016 · US
Plasma processing apparatus
US-2016118224-A1 · Apr 28, 2016 · US
Temperature measuring method and plasma processing system
US-2015221482-A1 · Aug 6, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 10 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0421 | 5 |
| H01J2237/334 | 4 |
| H01J37/32192 | 4 |
| H01J37/32724 | 3 |
| H01J37/32522 | 3 |