Support unit and apparatus for treating substrate
US-12456606-B2 · Oct 28, 2025 · US
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Son Hyoungkyu patents
Son Hyoungkyu is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Son Hyoungkyu |
| Total patents | 10 |
| First publication | Jan 7, 2021 |
| Latest publication | Oct 28, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate treating apparatus and substrate support unit
US-2025166977-A1 · May 22, 2025 · US
Substrate treating apparatus and substrate support unit
US-12249491-B2 · Mar 11, 2025 · US
Liner structure and substrate processing apparatus including the same
US-2024177976-A1 · May 30, 2024 · US
Support unit and substrate treating apparatus including the same
US-11915905-B2 · Feb 27, 2024 · US
Substrate processing device
US-2023369029-A1 · Nov 16, 2023 · US
Support unit and apparatus for treating substrate
US-2022199368-A1 · Jun 23, 2022 · US
Substrate treating apparatus and substrate support unit
US-2022044917-A1 · Feb 10, 2022 · US
Support unit and substrate treating apparatus including the same
US-2021005419-A1 · Jan 7, 2021 · US
Shower head unit and system for treating substrate with the shower head unit
US-2021005424-A1 · Jan 7, 2021 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 10 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32715 | 9 |
| H10P72/72 | 6 |
| H01J2237/2007 | 6 |
| H01J37/32082 | 6 |
| H10P72/0434 | 5 |