Inspection systems using metasurface and integrated optical systems for lithography
US-2026093186-A1 · Apr 2, 2026 · US
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Setija Irwan Dani patents
Setija Irwan Dani is listed as an inventor on 21 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Setija Irwan Dani |
| Total patents | 21 |
| First publication | Sep 22, 2016 |
| Latest publication | Apr 2, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Passive integrated optical systems and methods for reduction of spatial optical coherence
US-2025341781-A1 · Nov 6, 2025 · US
Method and apparatuses for fourier transform spectrometry
US-2025305882-A1 · Oct 2, 2025 · US
Metrology systems, coherence scrambler illumination sources and methods thereof
US-12393046-B2 · Aug 19, 2025 · US
Metrology method and system and lithographic system
US-2024241454-A1 · Jul 18, 2024 · US
Metrology method and apparatus
US-2024184222-A1 · Jun 6, 2024 · US
Metrology method and system and lithographic system
US-2024094643-A1 · Mar 21, 2024 · US
Metrology systems, coherence scrambler illumination sources and methods thereof
US-2022342228-A1 · Oct 27, 2022 · US
Alignment measurement system
US-11042096-B2 · Jun 22, 2021 · US
Method and apparatus for calculating electromagnetic scattering properties of finite periodic structures
US-10948409-B2 · Mar 16, 2021 · US
Recent patents
Latest publications not already listed above.
Alignment measurement system
US-10942461-B2 · Mar 9, 2021 · US
Method and apparatus for measuring a structure on a substrate
US-10788765-B2 · Sep 29, 2020 · US
Alignment Measurement System
US-2020241433-A1 · Jul 30, 2020 · US
Alignment Measurement System
US-2020142319-A1 · May 7, 2020 · US
Method and apparatus for measuring a structure on a substrate
US-2019354026-A1 · Nov 21, 2019 · US
Method and apparatus for calculating electromagnetic scattering properties of finite periodic structures
US-10408753-B2 · Sep 10, 2019 · US
Methods and apparatus for calculating electromagnetic scattering properties of a structure and for estimation of geometrical and material parameters thereof
US-9939250-B2 · Apr 10, 2018 · US
Method and Apparatus for Calculating Electromagnetic Scattering Properties of Finite Periodic Structures
US-2018011014-A1 · Jan 11, 2018 · US
Method and apparatus for measuring a structure on a substrate, models for error correction, computer program products for implementing such methods and apparatus
US-9772562-B2 · Sep 26, 2017 · US
Method and Apparatus for Measuring a Structure on a Substrate, Models for Error Correction, Computer Program Products for Implementing such Methods and Apparatus
US-2016313653-A1 · Oct 27, 2016 · US
Methods and Apparatus for Calculating Electromagnetic Scattering Properties of a Structure and for Estimation of Geometrical and Material Parameters thereof
US-2016273906-A1 · Sep 22, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 21 |
| Asml Holding Nv | 2 |
| Pisarenco Maxim | 1 |
| Setija Irwan Dani | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/705 | 9 |
| G03F7/70633 | 8 |
| G03F9/7084 | 7 |
| G03F9/7053 | 7 |
| G03F7/70625 | 7 |