Methods and apparatus for calculating electromagnetic scattering properties of a structure and for estimation of geometrical and material parameters thereof

Patent metadata

Field	Value
Publication number	US-9939250-B2
Application number	US-201415036471-A
Country	US
Kind code	B2
Filing date	Nov 4, 2014
Priority date	Nov 26, 2013
Publication date	Apr 10, 2018
Grant date	Apr 10, 2018

Abstract

In scatterometry, a merit function including a regularization parameter is used in an iterative process to find values for the scattering properties of the measured target. An optimal value for the regularization parameter is obtained for each measurement target and in each iteration of the iterative process. Various methods can be used to find the value for the regularization parameter, including the Discrepancy Principle, the chi-squared method and novel modifications of the Discrepancy Principle and the chi-squared method including a merit function.

First claim

What is claimed is:

1. A method of calculating electromagnetic scattering properties of a structure, the method comprising:
illuminating, using an illumination system, the structure with radiation;
measuring, using a detection system, radiation scattered from the structure to obtain measurement data;
obtaining a prior estimate of the electromagnetic scattering properties of the structure;
deriving a regularization coefficient based on the measurement data;
obtaining estimates of the electromagnetic scattering properties by using trial values of the electromagnetic scattering properties and the regularization coefficient;
determining whether a termination condition is met using a merit function, parameters of the merit function including the regularization coefficient the prior estimate, and the estimates of the electromagnetic scattering properties; and
if the termination condition is not met, iteratively repeating the obtaining a prior estimate and the deriving a regularization coefficient until the termination condition is satisfied;
whereby the trial values provided by a final iteration represent the calculated electromagnetic scattering properties.

2. The method according to claim 1 , wherein the deriving a regularization coefficient comprises finding a value for the regularization coefficient which gives a predetermined value for a second merit function.

3. The method according to claim 2 , wherein the second merit function used for finding the value for the regularization coefficient is same as the merit function for obtaining estimates of the electromagnetic scattering properties.

4. The method according to claim 2 , wherein a compact merit function is used for finding the value for the regularization coefficient.

5. The method according to claim 2 , wherein the predetermined value is equal to a number of data points in the measurement data.

6. The method according to claim 2 , wherein the predetermined value is equal to a number of scattering properties.

7. The method according to claim 1 , wherein the deriving a regularization coefficient uses a method of: the discrepancy principle; generalized discrepancy principle; modified discrepancy principle; transformed discrepancy principle; the chi-squared principle; the L-curve; generalized cross validation (GCV); unbiased predictive risk estimator; Regińska's rule; or the normalized cumulative periodogram (NCP).

8. The method according to claim 1 , wherein the deriving a regularization coefficient comprises calculating a regularization coefficient per scattering property.

9. An inspection apparatus for estimating electromagnetic scattering properties of a structure of an object, the inspection apparatus comprising:
an illumination system configured to illuminate the object with radiation;
a detection system configured to measure radiation scattered from the structure of the object to obtain measurement data; and
a processor configured to estimate the electromagnetic scattering properties using operations comprising:
obtaining a prior estimate of the electromagnetic scattering properties of the structure;
deriving a regularization coefficient based on the measurement data;
obtaining estimates of the electromagnetic scattering properties by using trial values of the electromagnetic scattering properties and the regularization coefficient;
determining whether a termination condition is met using a merit function, parameters of the merit function including the regularization coefficient the prior estimate, and the estimates of the electromagnetic scattering properties; and
if the termination condition is not met, iteratively repeating the obtaining a prior estimate and the deriving a regularization coefficient until the termination condition is satisfied;
whereby the trial values provided by a final iteration represent the calculated electromagnetic scattering properties.

10. A method comprising:
illuminating, using an illumination system, a structure with radiation;
measuring, using a detection system, radiation scattered from the structure to obtain measurement data;
using a non-transient computer readable medium comprising machine-readable instructions for calculating electromagnetic scattering properties of the structure, the instructions configured to cause one or more processors to perform operations comprising:
obtaining a prior estimate of the electromagnetic scattering properties of the structure;
deriving a regularization coefficient based on the measurement data;
obtaining estimates of the electromagnetic scattering properties by using trial values of the electromagnetic scattering properties and the regularization;
determining whether a termination condition is met using a merit function, parameters of the merit function including the regularization coefficient the prior estimate, and the estimates of the electromagnetic scattering properties; and
if the termination condition is not met, iteratively repeating the obtaining a prior estimate and the deriving a regularization coefficient until the termination condition is satisfied;
whereby the trial values provided by a final iteration represent the calculated electromagnetic scattering properties.

11. The method according to claim 1 , wherein the deriving a regularization coefficient comprises calculating an optimal value for the regularization coefficient.

12. The method according to claim 1 , wherein the deriving a regularization coefficient comprises using a singular value decomposition (SVD) to reduce a number of data points in the measurement data.

13. The method according to claim 1 , further comprising:
determining whether the regularization coefficient is to be used for obtaining the estimates of the electromagnetic scattering properties.

14. The method according to claim 13 , further comprising:
in response to determining that the regularization coefficient is to be used for obtaining the estimates of the electromagnetic scattering properties, determining whether a set value of the regularization coefficient is to be used.

Assignees

• Asml Netherlands Bv

Inventors

• Pisarenco Maxim
• Setija Irwan Dani

Classifications

• G03F7/70625

  Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness · CPC title

• G01B11/02 Primary

  for measuring length, width or thickness (G01B11/08 takes precedence) · CPC title

• G03F7/70633

  Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching · CPC title

• G03F7/705 Primary

  Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions · CPC title

• G03F7/706847

  Production of measurement radiation, e.g. synchrotron, free-electron laser, plasma source or higher harmonic generation [HHG] · CPC title