Electrostatic chucks with hybrid pucks to improve thermal performance and leakage current stability
US-2025379090-A1 · Dec 11, 2025 · US
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Sarode Yogananda patents
Sarode Yogananda is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sarode Yogananda |
| Total patents | 9 |
| First publication | Dec 20, 2018 |
| Latest publication | Dec 11, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic chucks with hybrid pucks to improve thermal performance and leakage current stability
US-12412769-B2 · Sep 9, 2025 · US
In-situ semiconductor processing chamber temperature apparatus
US-2025069921-A1 · Feb 27, 2025 · US
In-situ semiconductor processing chamber temperature apparatus
US-12183605-B2 · Dec 31, 2024 · US
Electrostatic chucks with hybrid pucks to improve thermal performance and leakage current stability
US-2024387224-A1 · Nov 21, 2024 · US
Symmetric semiconductor processing chamber
US-2024170262-A1 · May 23, 2024 · US
Symmetric semiconductor processing chamber
US-2023020539-A1 · Jan 19, 2023 · US
In-situ semiconductor processing chamber temperature apparatus
US-2022076972-A1 · Mar 10, 2022 · US
In-situ semiconductor processing chamber temperature apparatus
US-2018366354-A1 · Dec 20, 2018 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0602 | 4 |
| H10P74/203 | 4 |
| H10P72/04 | 4 |
| G01J5/48 | 4 |
| G01K3/14 | 4 |