Apparatus and method for treating substrate
US-12593649-B2 · Mar 31, 2026 · US
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Park Gui Su patents
Park Gui Su is listed as an inventor on 31 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Park Gui Su |
| Total patents | 31 |
| First publication | Dec 1, 2016 |
| Latest publication | Mar 31, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus and method for treating substrate
US-12491532-B2 · Dec 9, 2025 · US
Apparatus for treating substrate and method for treating substrate
US-12412767-B2 · Sep 9, 2025 · US
Support unit, substrate treating apparatus including the same, and substrate treating method
US-12278121-B2 · Apr 15, 2025 · US
Substrate transferring apparatus, and liquid processing apparatus and substrate processing equipment including same
US-2024222174-A1 · Jul 4, 2024 · US
Apparatus and method for treating substrate
US-2024216940-A1 · Jul 4, 2024 · US
Substrate treating apparatus and substrate treating system including the same
US-2024203761-A1 · Jun 20, 2024 · US
Liquid supply unit, and apparatus and method for processing substrate
US-11869778-B2 · Jan 9, 2024 · US
Buffer chamber, substrate treating apparatus and substrate treating method
US-2023415191-A1 · Dec 28, 2023 · US
Fluid supply unit and substrate treating apparatus having the same
US-11794220-B2 · Oct 24, 2023 · US
Recent patents
Latest publications not already listed above.
Substrate treating apparatus
US-11765793-B2 · Sep 19, 2023 · US
Substrate support unit and substrate treating apparatus having the same
US-11721575-B2 · Aug 8, 2023 · US
Apparatus for treating substrate and method for treating substrate
US-2023147919-A1 · May 11, 2023 · US
Apparatus and method of treating substrate
US-2023110780-A1 · Apr 13, 2023 · US
Apparatus and method for treating substrate
US-2023096569-A1 · Mar 30, 2023 · US
Substrate treating apparatus and substrate treating method
US-11594421-B2 · Feb 28, 2023 · US
Substrate treating method and substrate treating apparatus
US-11232942-B2 · Jan 25, 2022 · US
Liquid supply unit, and apparatus and method for processing substrate
US-2021202274-A1 · Jul 1, 2021 · US
Support unit, substrate treating apparatus including the same, and substrate treating method
US-2021050235-A1 · Feb 18, 2021 · US
Substrate treating apparatus
US-2021022213-A1 · Jan 21, 2021 · US
Substrate treating apparatus and substrate treating method
US-2021013047-A1 · Jan 14, 2021 · US
Fluid supply unit and substrate treating apparatus having the same
US-2021008606-A1 · Jan 14, 2021 · US
Substrate support unit and substrate treating apparatus having the same
US-2020402836-A1 · Dec 24, 2020 · US
Substrate treatment apparatus
US-2020395228-A1 · Dec 17, 2020 · US
Substrate treating method and substrate treating apparatus
US-2020365395-A1 · Nov 19, 2020 · US
Standby port and substrate processing apparatus having the same
US-10825699-B2 · Nov 3, 2020 · US
Standby port and substrate processing apparatus having the same
US-2019189471-A1 · Jun 20, 2019 · US
Apparatus for processing substrate
US-10283390-B2 · May 7, 2019 · US
Substrate treating apparatus and substrate treating method
US-2019115224-A1 · Apr 18, 2019 · US
Substrate treating apparatus and substrate treating method
US-2018337070-A1 · Nov 22, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 31 |
| Seoul Nat Univ R&Db Foundation | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 23 |
| H10P72/0448 | 19 |
| H10P72/0408 | 15 |
| H10P72/0424 | 11 |
| H01L21/67051 | 11 |