Standby port and substrate processing apparatus having the same

Patent metadata

Field	Value
Publication number	US-10825699-B2
Application number	US-201816224891-A
Country	US
Kind code	B2
Filing date	Dec 19, 2018
Priority date	Dec 20, 2017
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.

First claim

What is claimed is:

1. An apparatus for processing a substrate, the apparatus comprising:
a support unit configured to support the substrate;
a container configured to surround the support unit and collect a processing liquid;
a processing liquid supply unit including a nozzle configured to supply the processing liquid onto the substrate supported by the support unit; and
a standby port where the nozzle stands by when the substrate is not processed, the standby port being disposed on a side of the container,
wherein the standby port includes:
a body including an inner space that is open at the top such that the processing liquid discharged from the nozzle is introduced into the inner space;
a drain line connected to the body and configured to drain the processing liquid in the inner space; and
an exhaust unit configured to exhaust an atmosphere in the inner space, and
wherein the exhaust unit includes:
a housing having a ring shape, the housing being configured to surround the body and having an exhaust space into which the atmosphere in the inner space flows; and
an exhaust line connected to the housing and configured to forcibly exhaust an atmosphere in the housing,
wherein an inlet of the exhaust space, into which the atmosphere in the inner space flows, is provided above the inner space.

2. The apparatus of claim 1 , wherein the exhaust line is connected to a lower end region of the housing.

3. The apparatus of claim 1 , wherein the housing includes:
a sidewall configured to surround the body; and
an upper wall extending inward from an upper end of the sidewall and located above the body,
wherein a spacing space between an upper end of the body and a lower end of the upper wall serves as an inlet through which the atmosphere in the inner space flows into the exhaust space.

4. The apparatus of claim 3 , wherein an area of a central hole formed in the center of the upper wall is smaller than an area of the inner space when viewed from above.

5. The apparatus of claim 3 , wherein the nozzle is disposed above the upper wall when the processing liquid is discharged from the nozzle into the inner space, and a distance between an outlet end of the nozzle and the upper wall is less than three times a vertical width of the inlet.

6. A standby port provided in a chamber configured to perform liquid processing on a substrate, the standby port comprising:
a body including an inner space that is open at the top such that a processing liquid discharged from a nozzle is introduced into the inner space;
a drain line connected to the body and configured to drain the processing liquid in the inner space; and
an exhaust unit configured to exhaust an atmosphere in the inner space,
wherein the exhaust unit includes:
a housing having a ring shape, the housing being configured to surround the body and having an exhaust space into which the atmosphere in the inner space flows; and
an exhaust line connected to the housing and configured to forcibly exhaust an atmosphere in the housing,
wherein an inlet of the exhaust space, into which the atmosphere in the inner space flows, is provided above the inner space.

7. The standby port of claim 6 , wherein the exhaust line is connected to a lower end region of the housing.

8. The standby port of claim 6 , wherein the housing includes:
a sidewall configured to surround the body; and
an upper wall extending inward from an upper end of the sidewall and located above the body,
wherein a spacing space between an upper end of the body and a lower end of the upper wall serves as an inlet through which the atmosphere in the inner space flows into the exhaust space.

Assignees

• Semes Co Ltd

Inventors

• Jung Buyoung
• Kim Jonghan
• Jang Young Jin
• Yu Jin Tack
• Choi Youngjun
• Kim Daehun
• Bang Byungsun
• Woo Jonghyeon
• Kim Heehwan
• Shin Cheol-Yong
• Park Gui Su

Classifications

• H10P72/0404 Primary

  for general liquid treatment, e.g. etching followed by cleaning · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H01L21/67017

  Electricity · mapped topic