Liquid supply unit, and apparatus and method for processing substrate

Patent metadata

Field	Value
Publication number	US-11869778-B2
Application number	US-202017137233-A
Country	US
Kind code	B2
Filing date	Dec 29, 2020
Priority date	Dec 31, 2019
Publication date	Jan 9, 2024
Grant date	Jan 9, 2024

Abstract

An apparatus for processing a substrate includes a housing, a support unit that supports the substrate in the housing, a nozzle that dispenses a processing liquid onto the substrate, and a liquid supply unit that supplies the processing liquid to the nozzle. The liquid supply unit includes a container having a storage space in which the processing liquid is stored, a liquid supply tube through which the processing liquid flows from the container to the nozzle, and an ultrasonic-wave application member that applies ultrasonic waves to the processing liquid before the processing liquid is supplied to the nozzle. The ultrasonic-wave application member includes a liquid reservoir having an interior space in which a liquid is received and an ultrasonic generator that applies ultrasonic waves to the liquid received in the liquid reservoir. Part of the liquid supply tube is immersed in the liquid received in the liquid reservoir.

First claim

What is claimed is:

1. An apparatus for processing a substrate, the apparatus comprising:
a housing having a processing space inside;
a support unit configured to support the substrate in the housing;
a nozzle configured to dispense a processing liquid onto the substrate supported on the support unit; and
a liquid supply unit configured to supply the processing liquid to the nozzle, wherein the liquid supply unit includes:
a container having a storage space in which the processing liquid is stored;
a liquid supply tube through which the processing liquid flows from the container to the nozzle; and
an ultrasonic-wave application member configured to apply ultrasonic waves to the processing liquid before the processing liquid is supplied to the nozzle,
wherein the ultrasonic-wave application member includes:
a liquid reservoir having an interior space in which a liquid is received;
an ultrasonic generator configured to apply ultrasonic waves to the liquid received in the liquid reservoir; and
an electromagnetic field generator configured to generate an electromagnetic field in the liquid supply tube,

wherein part of the liquid supply tube is immersed in the liquid received in the liquid reservoir and the electromagnetic field generator is provided in the liquid reservoir,
wherein an area of the liquid supply tube that is immersed in the liquid received in the liquid reservoir includes:
a first tubular portion through which the processing liquid flows upward;
a second tubular portion that is connected to the first tubular portion and through which the processing liquid flows in a direction perpendicular to the first tubular portion; and
a third tubular portion that is connected to the second tubular portion and through which the processing liquid flows downward, and
wherein the electromagnetic field generator is disposed only on the third tubular portion.

2. The apparatus of claim 1 , wherein in an area immersed in the liquid received in the liquid reservoir, the part of the liquid supply tube is provided in a zigzag form.

3. The apparatus of claim 1 , wherein in an area immersed in the liquid received in the liquid reservoir, the part of the liquid supply tube is provided in a coil form.

4. The apparatus of claim 1 , further comprising:
a filter installed in the liquid supply tube and configured to filter impurities from the processing liquid to be supplied to the nozzle,
wherein the ultrasonic-wave application member is disposed upstream of the filter.

5. The apparatus of claim 1 , wherein the processing liquid includes a chemical or an organic solvent.

6. A liquid supply unit comprising:
a container having a storage space in which a processing liquid is stored;
a liquid supply tube through which the processing liquid flows from the container to a nozzle; and
an ultrasonic-wave application member configured to apply ultrasonic waves to the processing liquid before the processing liquid is supplied to the nozzle,
wherein the ultrasonic-wave application member includes:
a liquid reservoir having an interior space in which a liquid is received;
an ultrasonic generator configured to apply ultrasonic waves to the liquid received in the liquid reservoir; and
an electromagnetic field generator configured to generate an electromagnetic field in the liquid supply tube, and
wherein part of the liquid supply tube is immersed in the liquid received in the liquid reservoir and the electromagnetic field generator is provided in the liquid reservoir wherein an area of the liquid supply tube that is immersed in the liquid received in the liquid reservoir includes:
a first tubular portion through which the processing liquid flows upward;
a second tubular portion that is connected to the first tubular portion and through which the processing liquid flows in a different direction from the first tubular portion; and
a third tubular portion that is connected to the second tubular portion and through which the processing liquid flows downward, and
wherein the electromagnetic field generator disposed only on the third tubular portion.

7. The liquid supply unit of claim 6 , wherein the part of the liquid supply tube immersed in the liquid received in the liquid reservoir is provided in a zigzag form.

8. The liquid supply unit of claim 6 , further comprising:
a filter installed in the liquid supply tube and configured to filter impurities from the processing liquid to be supplied to the nozzle,
wherein the ultrasonic-wave application member is disposed upstream of the filter.

9. The liquid supply unit of claim 6 , wherein the processing liquid includes a chemical or an organic solvent,
wherein the chemical is sulfuric acid, hydrofluoric acid, or a mixture thereof, and
wherein the organic solvent is isopropyl alcohol.

Assignees

• Semes Co Ltd

Inventors

• Yang Seungtae
• Choi Gi Hun
• Jung Buyoung
• Park Gui Su

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0448 Primary

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title