Semiconductor processing chamber adapter
US-12575360-B2 · Mar 10, 2026 · US
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Pakulski Ryan patents
Pakulski Ryan is listed as an inventor on 19 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Pakulski Ryan |
| Total patents | 19 |
| First publication | Apr 19, 2018 |
| Latest publication | Mar 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of isolating the chamber volume to process volume with internal wafer transfer capability
US-12567565-B2 · Mar 3, 2026 · US
Semiconductor chamber components with advanced coating techniques
US-2025299930-A1 · Sep 25, 2025 · US
Semiconductor chamber components with advanced coating techniques
US-12362150-B2 · Jul 15, 2025 · US
Low temperature electrostatic chuck
US-2025125181-A1 · Apr 17, 2025 · US
Using acoustic resonance sensor devices for radical species detection to monitor processing chamber conditions
US-2025093300-A1 · Mar 20, 2025 · US
Semiconductor chamber components with advanced coating techniques
US-2024304423-A1 · Sep 12, 2024 · US
Method of isolating the chamber volume to process volume with internal wafer transfer capability
US-2023095095-A1 · Mar 30, 2023 · US
Semiconductor processing chamber adapter
US-2023005765-A1 · Jan 5, 2023 · US
Systems and methods for workpiece processing
US-11257696-B2 · Feb 22, 2022 · US
Recent patents
Latest publications not already listed above.
Plasma strip tool with uniformity control
US-11201036-B2 · Dec 14, 2021 · US
Plasma Processing Apparatus With Post Plasma Gas Injection
US-2021005431-A1 · Jan 7, 2021 · US
Plasma processing apparatus with post plasma gas injection
US-10790119-B2 · Sep 29, 2020 · US
Systems and Methods for Workpiece Processing
US-2020176288-A1 · Jun 4, 2020 · US
Systems and methods for workpiece processing
US-10580672-B2 · Mar 3, 2020 · US
Plasma Processing Apparatus With Post Plasma Gas Injection
US-2018358208-A1 · Dec 13, 2018 · US
Plasma Processing Apparatus
US-2018358206-A1 · Dec 13, 2018 · US
Plasma Strip Tool With Uniformity Control
US-2018358210-A1 · Dec 13, 2018 · US
Systems and Methods for Workpiece Processing
US-2018108548-A1 · Apr 19, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Mattson Tech Inc | 10 |
| Applied Materials Inc | 9 |
| Beijing E Town Semiconductor Tech Co Ltd | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32715 | 8 |
| H10P72/0421 | 7 |
| H01J37/3244 | 6 |
| H01J37/32422 | 6 |
| H10P72/0604 | 5 |