Systems and methods for workpiece processing

Patent metadata

Field	Value
Publication number	US-10580672-B2
Application number	US-201715726437-A
Country	US
Kind code	B2
Filing date	Oct 6, 2017
Priority date	Oct 18, 2016
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

Systems and methods for processing workpieces, such as semiconductor workpieces are provided. One example embodiment is directed to a processing system for processing a plurality of workpieces. The plasma processing system can include a loadlock chamber. The loadlock chamber can include a workpiece column configured to support a plurality of workpieces in a stacked arrangement. The system can further include at least two process chambers. The at least two process chambers can have at least two processing stations. Each processing station can have a workpiece support for supporting a workpiece during processing in the process chamber. The system further includes a transfer chamber in process flow communication with the loadlock chamber and the process chamber. The transfer chamber includes a rotary robot. The rotary robot can be configured to transfer a plurality of workpieces from the stacked arrangement in the loadlock chamber to the at least two processing stations.

First claim

What is claimed is:

1. A processing system for processing a plurality of workpieces, the processing system comprising:
a loadlock chamber, the loadlock chamber comprising a workpiece column configured to support a plurality of workpieces in a stacked arrangement;
at least two process chambers, the at least two process chambers having at least two processing stations, each processing station associated with a workpiece support for supporting a workpiece during processing in the process chamber, wherein the at least two process chambers comprise the first process chamber and a second process chamber, each of the first process chamber and the second process chamber comprising at least two process stations, wherein the first process chamber and the second process chamber are disposed in a linear arrangement, the system comprising a transfer position configured to support a plurality of workpieces in a stacked arrangement; and
a transfer chamber in process flow communication with the loadlock chamber and the at least two process chambers;
wherein the transfer chamber comprises at least one rotary robot, the at least one rotary robot comprising at least two arms configured to rotate about an axis, the at least one rotary robot configured to transfer a plurality of workpieces from the workpiece column in the loadlock chamber to the at least two processing stations in each of the at least two process chambers, wherein the at least one rotary robot is configured to transfer the plurality of workpieces from the at least two processing stations in the first process chamber to the stacked arrangement in the transfer position;
wherein the at least two processing stations in each of the at least two process chambers are disposed in a linear arrangement;
wherein the at least two arms move in a scissor motion such that a first arm moves as a first part of the scissor motion to transfer a first workpiece located at a first position in the stacked arrangement to a first processing station in the linear arrangement of a first process chamber, and a second arm moves as a second part of the scissor motion to transfer a second workpiece located at a second position in the stacked arrangement to a second processing station in the linear arrangement of the first process chamber.

2. The processing system of claim 1 , wherein the first process chamber and the second process chamber are disposed on opposing sides of the transfer chamber such that the rotary robot can transfer the plurality of workpieces among the first process chamber and the second process chamber.

3. The processing system of claim 1 , wherein the system comprises a second rotary robot configured to transfer a plurality of workpieces from the stacked arrangement in the transfer position to the at least two processing stations in the second process chamber.

4. The processing system of claim 1 , wherein the transfer position is located in the transfer chamber.

5. The processing system of claim 1 , wherein the at least two process chambers comprise the first process chamber and a second process chamber disposed on opposing sides of the transfer chamber, the at least two process chambers further comprising a third process chamber disposed in a linear arrangement with the first process chamber and a fourth process chamber disposed in a linear arrangement with the second process chamber such that the third process chamber and the fourth process chamber are disposed on opposing sides of the transfer chamber, wherein each of the first process chamber, second process chamber, third process chamber, and fourth process chamber comprise at least two process stations.

6. The processing system of claim 5 , wherein the system further comprises a transfer position configured to support a plurality of workpieces in a stacked arrangement, wherein the at least one rotary robot comprises a first rotary robot configured to transfer a plurality of workpieces from the stacked arrangement in the loadlock chamber to the at least two processing stations in the first process chamber and a second rotary robot configured to transfer a plurality of workpieces from the stacked arrangement in the transfer position to the at least two processing stations in the third process chamber.

7. The processing system of claim 1 , wherein at least one of the at least two arms is a primary arm configured to rotate about a pivot point, the primary arm coupled to a plurality of secondary arms, each secondary arm associated with at least one workpiece blade configured to support one of the plurality of workpieces.

8. The processing system of claim 1 , wherein the at least one rotary robot is configured to extend the at least two arms and to scissor open a plurality of workpiece blades to transfer the plurality of workpieces to the at least two processing stations in the process chamber.

9. The processing system of claim 8 , wherein the at least one rotary robot is configured to extend the at least two arms and to scissor open the plurality of workpiece blades using a single motor.

10. The processing system of claim 1 , wherein the at least two arms comprise a first arm having one or more workpiece blades and a second arm comprising one or more workpiece blades.

11. The processing system of claim 10 , wherein the first arm is configured to transfer one of the plurality of workpieces from the column in the loadlock chamber to the first processing station in the first process chamber and the second arm is configured to transfer one of the plurality of workpieces from the column in the loadlock chamber to the second processing station in the first process chamber.

12. A processing system for processing workpieces, comprising:
a workpiece column configured to support a plurality of workpieces in a stacked arrangement;
a first rotary robot;
a second rotary robot;
a first process chamber;
a second process chamber, the second process chamber disposed in a linear arrangement with the first process chamber;
the first rotary robot configured to transfer the plurality of workpieces from the workpiece column to at least two processing stations in the first process chamber, the first rotary robot configured to transfer the plurality of workpieces from the first process chamber to a transfer position, wherein the first rotary robot is configured to transfer the plurality of workpieces from the first process chamber to a stacked arrangement in the transfer position;
the second rotary robot configured to transfer the plurality of workpieces from the transfer position to the second process chamber;
wherein the first rotary robot comprises at least two arms configured to rotate about an axis,
wherein the at least two processing stations in the first process chambers are disposed in a linear arrangement;
wherein the at least two arms move in a scissor motion such that a first arm moves as a first part of the scissor motion to transfer a first workpiece located at a first position in the stacked arrangement to a first processing station in the linear arrangement of the first process chamber, and a second arm moves as a second part of the scissor motion to transfer a second workpiece located at a second position in the stacked arrangement to a second processing station in the linear arrangement of the first process chamber.

Assignees

• Mattson Tech Inc
• Beijing E Town Semiconductor Tech Co Ltd

Inventors

• Yang Michael
• Pakulski Ryan

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/0454 Primary

  surrounding a central transfer chamber · CPC title

• H01L21/67742

  Electricity · mapped topic

• H01L21/67201

  Electricity · mapped topic