Substrate processing apparatus
US-12538753-B2 · Jan 27, 2026 · US
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Muramoto Ryo patents
Muramoto Ryo is listed as an inventor on 49 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Muramoto Ryo |
| Total patents | 49 |
| First publication | Jan 15, 2015 |
| Latest publication | Jan 27, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus
US-12431369-B2 · Sep 30, 2025 · US
Substrate processing apparatus and substrate processing method
US-2024390953-A1 · Nov 28, 2024 · US
Substrate processing method and substrate processing apparatus
US-2024261814-A1 · Aug 8, 2024 · US
Substrate processing apparatus and substrate processing method
US-2024258107-A1 · Aug 1, 2024 · US
Substrate processing method and substrate processing apparatus
US-12042813-B2 · Jul 23, 2024 · US
Substrate holding apparatus and substrate processing apparatus
US-11961757-B2 · Apr 16, 2024 · US
Substrate processing apparatus
US-2023307256-A1 · Sep 28, 2023 · US
Substrate processing apparatus and substrate processing method
US-2023302476-A1 · Sep 28, 2023 · US
Substrate processing apparatus
US-2023094318-A1 · Mar 30, 2023 · US
Recent patents
Latest publications not already listed above.
Substrate processing apparatus
US-2023099910-A1 · Mar 30, 2023 · US
Substrate processing apparatus
US-2023096580-A1 · Mar 30, 2023 · US
Substrate processing apparatus
US-11443972-B2 · Sep 13, 2022 · US
Substrate processing system and substrate processing method
US-2022139699-A1 · May 5, 2022 · US
Substrate processing apparatus and substrate processing method
US-11211264-B2 · Dec 28, 2021 · US
Substrate processing apparatus
US-11101146-B2 · Aug 24, 2021 · US
Substrate processing method and substrate processing apparatus
US-2021197224-A1 · Jul 1, 2021 · US
Substrate processing apparatus and substrate processing method
US-2021175098-A1 · Jun 10, 2021 · US
Substrate holding apparatus and substrate processing apparatus
US-2021134652-A1 · May 6, 2021 · US
Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method
US-10998220-B2 · May 4, 2021 · US
Substrate processing apparatus, substrate processing system, and substrate processing method
US-10964556-B2 · Mar 30, 2021 · US
Substrate processing device
US-10910240-B2 · Feb 2, 2021 · US
Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method
US-10622242-B2 · Apr 14, 2020 · US
Heater cleaning method
US-10573542-B2 · Feb 25, 2020 · US
Substrate processing apparatus
US-2019252214-A1 · Aug 15, 2019 · US
Substrate processing apparatus
US-10249517-B2 · Apr 2, 2019 · US
Substrate inverting device, substrate processing apparatus, and substrate catch-and-hold device
US-2019096729-A1 · Mar 28, 2019 · US
Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method
US-2019067077-A1 · Feb 28, 2019 · US
Substrate processing device
US-2019019706-A1 · Jan 17, 2019 · US
Substrate processing device
US-2019013220-A1 · Jan 10, 2019 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Screen Holdings Co Ltd | 44 |
| Dainippon Screen Mfg | 10 |
| Muramoto Ryo | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 35 |
| H10P72/7618 | 23 |
| H01L21/67051 | 22 |
| H10P72/0424 | 18 |
| H01L21/68764 | 16 |