Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-12431369-B2
Application number	US-202318180405-A
Country	US
Kind code	B2
Filing date	Mar 8, 2023
Priority date	Mar 23, 2022
Publication date	Sep 30, 2025
Grant date	Sep 30, 2025

Abstract

This invention includes a substrate holder provided rotatably about an axis of rotation extending in a vertical direction while sucking and holding a central part of a lower surface of a substrate, a rotating mechanism for outputting a rotational driving force for rotating the substrate holder, a processing mechanism for processing the substrate by supplying a processing liquid to the substrate held by the substrate holder, and a rotating cup provided rotatably about the axis of rotation while surrounding an outer periphery of the rotating substrate and configured to collect liquid droplets of the processing liquid scattered from the substrate. The rotating mechanism includes a power transmitter for transmitting a part of the rotational driving force as a cup driving force to the rotating cup, and simultaneously rotates the substrate holder and the rotating cup by the rotational driving force.

First claim

What is claimed is:

1. A substrate processing apparatus, comprising:
a substrate holder configured to suck and hold a central part of a lower surface of a substrate and provided rotatably about an axis of rotation extending in a vertical direction:
a rotating mechanism configured to output a rotational driving force for rotating the substrate holder,
a processing mechanism configured to process the substrate by supplying a processing liquid to the substrate held by the substrate holder; and
a rotating cup configured to collect liquid droplets of the processing liquid scattered from the substrate and provided rotatably about the axis of rotation while surrounding an outer periphery of the rotating substrate, wherein
the rotating mechanism includes a power transmitter configured to transmit a part of the rotational driving force as a cup driving force to the rotating cup, the rotating mechanism configured to simultaneously rotate the substrate holder and the rotating cup by the rotational driving force.

2. The substrate processing apparatus according to claim 1 , wherein: the processing mechanism includes: a lower surface nozzle arranged between the power transmitter and the substrate in the vertical direction, the lower surface nozzle configured to discharge the processing liquid toward a peripheral edge part of the lower surface of the rotating substrate; a processing liquid supplier configured to supply the processing liquid from below the power transmitter in the vertical direction; and a pipe configured to connect the processing liquid supplier and the lower surface nozzle while being inserted into the gap so as to send the processing liquid supplied from the processing liquid supplier to the lower surface nozzle.

Assignees

• Screen Holdings Co Ltd

Inventors

• Nemoto Shuhei
• Shoji Kazuhiro
• Muramoto Ryo

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0404

  for general liquid treatment, e.g. etching followed by cleaning · CPC title