Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-11101146-B2
Application number	US-201816231399-A
Country	US
Kind code	B2
Filing date	Dec 22, 2018
Priority date	Feb 13, 2018
Publication date	Aug 24, 2021
Grant date	Aug 24, 2021

Abstract

A protective disk is disposed between a spin base and a substrate W and is capable of being raised and lowered between a separated position which is separated downward from the substrate W and a near position which is nearer to the substrate than the separated position. An upper surface of the protective disk has an inner surface which is provided on an inner side of a plurality of holding pins in a radial direction and a flat surface which is provided on an outer side of the inner surface in the radial direction and is provided above the inner surface. The flat surface faces a lower surface of a part on an inner side of an outer circumferential end in the radial direction, in a circumferential edge portion of the substrate.

First claim

What is claimed is:

1. A substrate processing apparatus for processing a substrate, comprising:
a spin base that rotates around a rotation axis extending in a vertical direction;
a plurality of holding portions that are provided in the spin base with intervals therebetween in a rotation direction of the spin base and hold a circumferential edge portion of the substrate above the spin base;
a facing member that is disposed between the spin base and the substrate and is capable of being raised and lowered between a separated position which is separated downward from the substrate and a near position which is nearer to the substrate than the separated position; and
a gas supply portion that supplies a gas to a space between the facing member and the substrate which is held by the plurality of holding portions,
wherein an upper surface of the facing member comprises
a flat surface which faces a lower surface of a part on an inner side of an outer circumferential end in a radial direction, in the circumferential edge portion of the substrate, and
an inner surface which is provided on an inner side of the flat surface in the radial direction and is provided below the flat surface,

wherein the flat surface comprises
a plurality of pin insertion holes through which the plurality of holding portions for gripping the substrate from a side of the substrate is inserted therein, and intersects the circumferential edge portion of the substrate viewing in the vertical direction,
a first flat part which is located on an inner side of each of the plurality of pin insertion holes in the radial direction, and
a second flat part which is a portion of the flat surface other than the plurality of pin insertion holes and faces the lower surface comprising the outer circumferential end of the substrate,
wherein the first flat part protrudes inward in the radial direction beyond other parts of the flat surface in the circumferential direction,
an inclined surface is provided between the inner surface and the flat surface,
wherein the inclined surface comprises
a first inclined surface which connects to the first flat part, and a second inclined surface which connects to the second flat part, and
a first boundary between the first flat part and the inner surface which protrudes inward in the radial direction beyond a second boundary between the second flat part and the inner surface.

2. The substrate processing apparatus according to claim 1 ,
wherein the upper surface of the facing member comprises the inclined surface which is inclined upward to an outer side in the radial direction between the inner surface and the flat surface.

3. The substrate processing apparatus according to claim 1 ,
wherein the flat surface of the facing member extends outward in the radial direction from a position on an inner side of the plurality of holding portions in the radial direction.

4. The substrate processing apparatus according to claim 1 ,
wherein the flat surface extends outward in the radial direction beyond the substrate.

5. The substrate processing apparatus according to claim 1 , further comprising:
a processing liquid supply portion that supplies a processing liquid to the upper surface of the substrate held by the plurality of holding portions.

Assignees

• Screen Holdings Co Ltd

Inventors

• Okita Nobuaki
• Muramoto Ryo
• Nishida Takayuki

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7608 Primary

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0412

  using mainly scrubbing means, e.g. brushes · CPC title