Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program
US-12461507-B2 · Nov 4, 2025 · US
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Maeda Kiyohiko patents
Maeda Kiyohiko is listed as an inventor on 21 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Maeda Kiyohiko |
| Total patents | 21 |
| First publication | Mar 12, 2015 |
| Latest publication | Nov 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-10840094-B2 · Nov 17, 2020 · US
Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program
US-2020333766-A1 · Oct 22, 2020 · US
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
US-10497561-B2 · Dec 3, 2019 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-2019206679-A1 · Jul 4, 2019 · US
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
US-2019189422-A1 · Jun 20, 2019 · US
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
US-10229829-B2 · Mar 12, 2019 · US
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
US-10163625-B2 · Dec 25, 2018 · US
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
US-2018233351-A1 · Aug 16, 2018 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-9793107-B2 · Oct 17, 2017 · US
Recent patents
Latest publications not already listed above.
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-9698007-B2 · Jul 4, 2017 · US
Method of manufacturing semiconductor device and substrate processing apparatus
US-9666430-B2 · May 30, 2017 · US
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
US-2017103885-A1 · Apr 13, 2017 · US
Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus
US-9349587-B2 · May 24, 2016 · US
Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program
US-2015370245-A1 · Dec 24, 2015 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-2015332916-A1 · Nov 19, 2015 · US
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium
US-9177786-B2 · Nov 3, 2015 · US
Boat for substrate processing apparatus
US-D740769-S · Oct 13, 2015 · US
Boat for substrate processing apparatus
US-D739831-S · Sep 29, 2015 · US
Method of manufacturing semiconductor device and substrate processing apparatus
US-2015126021-A1 · May 7, 2015 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-2015072537-A1 · Mar 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Hitachi Int Electric Inc | 15 |
| Kokusai Electric Corp | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/52 | 17 |
| H10P14/24 | 16 |
| H10P14/6339 | 12 |
| H10P14/6682 | 11 |
| H10P14/6532 | 11 |