MEMS Resonator
US-2026100692-A1 · Apr 9, 2026 · US
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Lutz Markus patents
Lutz Markus is listed as an inventor on 66 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lutz Markus |
| Total patents | 66 |
| First publication | Jan 27, 2015 |
| Latest publication | Apr 9, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Stacked-die MEMS resonator
US-2025320116-A1 · Oct 16, 2025 · US
Non-lid-bonded MEMS resonator with phosphorus dopant
US-12445107-B2 · Oct 14, 2025 · US
Resonant elements and oscillators
US-12391543-B1 · Aug 19, 2025 · US
MEMS resonator integrated cicruit fabrication
US-12365582-B2 · Jul 22, 2025 · US
Stacked-die mems resonator
US-2025019229-A1 · Jan 16, 2025 · US
Suspension for Resonators and MEMS Devices
US-2025011162-A1 · Jan 9, 2025 · US
Ovenized MEMS
US-2025007455-A1 · Jan 2, 2025 · US
MEMS resonator with colocated temperature sensor
US-12095447-B1 · Sep 17, 2024 · US
MEMS resonator system
US-11987495-B2 · May 21, 2024 · US
Recent patents
Latest publications not already listed above.
Ovenized MEMS
US-11909354-B2 · Feb 20, 2024 · US
Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
US-2024056054-A1 · Feb 15, 2024 · US
MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientation
US-11897757-B1 · Feb 13, 2024 · US
Time module apparatus for use with fixed-beacon time transfer system
US-11871369-B1 · Jan 9, 2024 · US
Micromechanical structure with bonded cover
US-2024002218-A1 · Jan 4, 2024 · US
Stacked-die mems resonator
US-2023391611-A1 · Dec 7, 2023 · US
Multi-die integrated circuit package
US-11807518-B1 · Nov 7, 2023 · US
MEMS resonator with co-located temperature sensor
US-11770112-B1 · Sep 26, 2023 · US
Stacked-die MEMS resonator
US-11708264-B2 · Jul 25, 2023 · US
Microelectromechanical structure with bonded cover
US-11685650-B2 · Jun 27, 2023 · US
Ovenized mems
US-2022360218-A1 · Nov 10, 2022 · US
Stacked-die mems resonator
US-2022356059-A1 · Nov 10, 2022 · US
Ovenized MEMS
US-11374535-B2 · Jun 28, 2022 · US
Stacked-die MEMS resonator
US-11370656-B2 · Jun 28, 2022 · US
Fixed-beacon time transfer system
US-11218984-B1 · Jan 4, 2022 · US
Frequency compensated oscillator design for process tolerances
US-11146228-B2 · Oct 12, 2021 · US
Encapsulated microelectromechanical structure
US-2021221678-A1 · Jul 22, 2021 · US
Stacked-die mems resonator
US-2021179421-A1 · Jun 17, 2021 · US
Manufacturing of integrated circuit resonator
US-10913655-B2 · Feb 9, 2021 · US
Low-profile stacked-die mems resonator system
US-2020385261-A1 · Dec 10, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Sitime Corp | 56 |
| Bosch Gmbh Robert | 10 |
| SiTime Corpoaration | 1 |
| Partridge Aaron | 1 |
| Lutz Markus | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B81B2201/0271 | 37 |
| B81B2207/07 | 37 |
| B81B7/007 | 36 |
| B81C1/00301 | 36 |
| B81C2201/0171 | 22 |