Semiconductor device comprising contact structures with protection layers formed on sidewalls of contact etch stop layers
US-9590056-B2 · Mar 7, 2017 · US
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Lepper Marco patents
Lepper Marco is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lepper Marco |
| Total patents | 7 |
| First publication | Jan 29, 2015 |
| Latest publication | Mar 7, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Semiconductor device comprising contact structures with protection layers formed on sidewalls of contact etch stop layers
US-2016099321-A1 · Apr 7, 2016 · US
Methods for forming protection layers on sidewalls of contact etch stop layers
US-9269809-B2 · Feb 23, 2016 · US
Top corner rounding by implant-enhanced wet etching
US-9023709-B2 · May 5, 2015 · US
Method of forming contacts for devices with multiple stress liners
US-9023696-B2 · May 5, 2015 · US
Top corner rounding by implant-enhanced wet etching
US-2015064872-A1 · Mar 5, 2015 · US
Mol insitu pt rework sequence
US-2015028431-A1 · Jan 29, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Globalfoundries Inc | 7 |
| Baars Peter | 1 |
| Lepper Marco | 1 |
| Scheiper Thilo | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10W20/081 | 5 |
| H10W72/90 | 3 |
| H10W72/29 | 3 |
| H10W20/4435 | 3 |
| H10W20/4403 | 3 |