Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor
US-11735427-B2 · Aug 22, 2023 · US
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Lee Eun-Seok patents
Lee Eun-Seok is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lee Eun-Seok |
| Total patents | 7 |
| First publication | Apr 30, 2015 |
| Latest publication | Aug 22, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device
US-2022093405-A1 · Mar 24, 2022 · US
Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device
US-11222786-B2 · Jan 11, 2022 · US
Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device
US-2020152469-A1 · May 14, 2020 · US
Substrate cleaning apparatus
US-10340158-B2 · Jul 2, 2019 · US
Method of inspecting a surface of a substrate and apparatus for performing the same
US-9772296-B2 · Sep 26, 2017 · US
Method of inspecting a surface of a substrate and apparatus for performing the same
US-2015116698-A1 · Apr 30, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P90/123 | 4 |
| H10P74/203 | 4 |
| H10P52/00 | 4 |
| B24B49/00 | 4 |
| B24B57/02 | 4 |