Showerhead with controlled vapor deposition uniformity
US-2026002262-A1 · Jan 1, 2026 · US
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Lam Hyman patents
Lam Hyman is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lam Hyman |
| Total patents | 6 |
| First publication | Aug 18, 2015 |
| Latest publication | Jan 1, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Chamber matching and calibration
US-2022005713-A1 · Jan 6, 2022 · US
Apparatus and method for providing uniform flow of gas
US-RE47440-E · Jun 18, 2019 · US
Processing chamber gas delivery system with hot-swappable ampoule
US-9447497-B2 · Sep 20, 2016 · US
Deposition chambers with UV treatment and methods of use
US-9252024-B2 · Feb 2, 2016 · US
Apparatus and method for providing uniform flow of gas
US-9109754-B2 · Aug 18, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 6 |
| Wu Dien-Yeh | 1 |
| Johnson Mark S | 1 |
| Santi David M | 1 |
| Lam Hyman | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45565 | 3 |
| C23C16/45544 | 3 |
| F17D3/00 | 2 |
| C23C16/45578 | 2 |
| Y10T137/7833 | 2 |