Processing chamber gas delivery system with hot-swappable ampoule
US-9447497-B2 · Sep 20, 2016 · US
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Wu Dien-Yeh patents
Wu Dien-Yeh holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Feb 10, 2015 |
| Latest publication | Sep 20, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Apparatus and process for plasma-enhanced atomic layer deposition
US-9032906-B2 · May 19, 2015 · US
Ampoule with a thermally conductive coating
US-8951478-B2 · Feb 10, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Processing chamber gas delivery system with hot-swappable ampoule
US-9447497-B2 · Sep 20, 2016 · US
Apparatus and process for plasma-enhanced atomic layer deposition
US-9032906-B2 · May 19, 2015 · US
Ampoule with a thermally conductive coating
US-8951478-B2 · Feb 10, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| Y10T137/0419 | 1 |
| C23C16/45561 | 1 |
| Y10T137/4259 | 1 |
| H10P14/432 | 1 |
| H10W20/0425 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 3 |
| Electricity | 1 |
| Cross-Sectional Technologies | 1 |