Power feed member and substrate processing apparatus
US-10943766-B2 · Mar 9, 2021 · US
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Ito Etsuji patents
Ito Etsuji is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ito Etsuji |
| Total patents | 14 |
| First publication | Mar 12, 2015 |
| Latest publication | Mar 9, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Plasma processing apparatus
US-10763087-B2 · Sep 1, 2020 · US
Semiconductor manufacturing device and processing method
US-10699935-B2 · Jun 30, 2020 · US
Substrate processing method
US-10651012-B2 · May 12, 2020 · US
Plasma processing apparatus
US-2019096639-A1 · Mar 28, 2019 · US
Power feed member and substrate processing apparatus
US-2018374679-A1 · Dec 27, 2018 · US
Transfer apparatus and plasma processing system
US-10147633-B2 · Dec 4, 2018 · US
Plasma etching method
US-9978566-B2 · May 22, 2018 · US
Semiconductor manufacturing device and processing method
US-2018114717-A1 · Apr 26, 2018 · US
Semiconductor manufacturing device and processing method
US-9859146-B2 · Jan 2, 2018 · US
Recent patents
Latest publications not already listed above.
Substrate processing method
US-2017162367-A1 · Jun 8, 2017 · US
Plasma etching method
US-2017103877-A1 · Apr 13, 2017 · US
Substrate processing apparatus
US-9390943-B2 · Jul 12, 2016 · US
Etching method of multilayer film
US-2015072534-A1 · Mar 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 14 |
| Himori Shinji | 2 |
| Kato Takehiro | 2 |
| Ito Etsuji | 2 |
| Toko Electron Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32669 | 8 |
| H10P50/242 | 8 |
| H01J37/32091 | 7 |
| H10P72/0421 | 6 |
| H01L21/67069 | 6 |