Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate
US-11569558-B2 · Jan 31, 2023 · US
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Inoue Mitsuya patents
Inoue Mitsuya is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Inoue Mitsuya |
| Total patents | 18 |
| First publication | May 21, 2015 |
| Latest publication | Jan 31, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
High frequency power supply device and high frequency power supply method
US-11411541-B2 · Aug 9, 2022 · US
Directional coupler, substrate processing apparatus, and substrate processing method
US-2021234248-A1 · Jul 29, 2021 · US
High frequency power supply device and high frequency power supply method
US-2020313628-A1 · Oct 1, 2020 · US
Current collector, electrode, secondary battery and capacitor
US-9741498-B2 · Aug 22, 2017 · US
Raw material gas supply method
US-9563209-B2 · Feb 7, 2017 · US
Current collector, electrode structure, electrical storage device, and composition for current collectors
US-2016322641-A1 · Nov 3, 2016 · US
Current collector, electrode structure, nonaqueous electrolyte battery, and electrical storage device
US-2016126557-A1 · May 5, 2016 · US
Current collector, electrode structure, battery and capacitor
US-2016042878-A1 · Feb 11, 2016 · US
Current collector, electrode structure, and electrical storage device
US-2015311001-A1 · Oct 29, 2015 · US
Recent patents
Latest publications not already listed above.
Current collector, electrode, secondary battery, and capacitor
US-2015303484-A1 · Oct 22, 2015 · US
Current collector, electrode structure and non-aqueous electrolyte battery or electrical storage device
US-2015294802-A1 · Oct 15, 2015 · US
Collector, electrode structure, nonaqueous electrolyte battery, conductive filler, and electrical storage device
US-2015280241-A1 · Oct 1, 2015 · US
Film forming apparatus
US-9127358-B2 · Sep 8, 2015 · US
Current collector, electrode structure, and electrical storage device
US-2015221449-A1 · Aug 6, 2015 · US
Current collector, electrode, secondary cell, and capacitor
US-2015221452-A1 · Aug 6, 2015 · US
Current collector foil, electrode structure, lithium secondary battery, or electrical double layer capacitor
US-2015214551-A1 · Jul 30, 2015 · US
Gas supply device, film forming apparatus, gas supply method, and storage medium
US-2015140694-A1 · May 21, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Uacj Corp | 11 |
| Uacj Foil Corp | 11 |
| Furukawa Electric Co Ltd | 10 |
| Tokyo Electron Ltd | 7 |
| Nippon Foil Mfg | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.