Method for calibrating simulation process based on defect-based process window
US-2025355366-A1 · Nov 20, 2025 · US
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Hunsche Stefan patents
Hunsche Stefan is listed as an inventor on 68 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hunsche Stefan |
| Total patents | 68 |
| First publication | Aug 13, 2015 |
| Latest publication | Nov 20, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Identification of hot spots or defects by machine learning
US-2025341785-A1 · Nov 6, 2025 · US
Method for calibrating simulation process based on defect-based process window
US-12386268-B2 · Aug 12, 2025 · US
Identification of hot spots or defects by machine learning
US-12360461-B2 · Jul 15, 2025 · US
Method and apparatus for predicting substrate image
US-12271114-B2 · Apr 8, 2025 · US
Selection of measurement locations for patterning processes
US-12228862-B2 · Feb 18, 2025 · US
Process window optimizer
US-2025053702-A1 · Feb 13, 2025 · US
Metrology data correction using image quality metric
US-12189307-B2 · Jan 7, 2025 · US
Process window optimizer
US-12141507-B2 · Nov 12, 2024 · US
Process variability aware adaptive inspection and metrology
US-12092965-B2 · Sep 17, 2024 · US
Recent patents
Latest publications not already listed above.
Inspection data filtering systems and methods
US-2024264539-A1 · Aug 8, 2024 · US
Process window based on defect probability
US-2024126181-A1 · Apr 18, 2024 · US
Process window based on defect probability
US-11822255-B2 · Nov 21, 2023 · US
Selection of measurement locations for patterning processes
US-2023333481-A1 · Oct 19, 2023 · US
Method and apparatus for image analysis
US-11720029-B2 · Aug 8, 2023 · US
Selection of measurement locations for patterning processes
US-11681229-B2 · Jun 20, 2023 · US
Method and apparatus for pattern fidelity control
US-11669020-B2 · Jun 6, 2023 · US
Method for calibrating simulation process based on defect-based process window
US-2023076218-A1 · Mar 9, 2023 · US
Semiconductor device geometry method and system
US-2022327364-A1 · Oct 13, 2022 · US
Identification of hot spots or defects by machine learning
US-11443083-B2 · Sep 13, 2022 · US
Identification of hot spots or defects by machine learning
US-2022277116-A1 · Sep 1, 2022 · US
Method and apparatus for predicting substrate image
US-2022187713-A1 · Jun 16, 2022 · US
Process window optimizer
US-2022147665-A1 · May 12, 2022 · US
Process window optimizer
US-11238189-B2 · Feb 1, 2022 · US
Method and apparatus for image analysis
US-2022026811-A1 · Jan 27, 2022 · US
Process window based on defect probability
US-2021356874-A1 · Nov 18, 2021 · US
Method and apparatus for image analysis
US-11143970-B2 · Oct 12, 2021 · US
Focus and overlay improvement by modifying a patterning device
US-11126093-B2 · Sep 21, 2021 · US
Process variability aware adaptive inspection and metrology
US-2021255548-A1 · Aug 19, 2021 · US
Metrology data correction using image quality metric
US-2021241449-A1 · Aug 5, 2021 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 68 |
| Hunsche Stefan | 2 |
| Cao Yu | 1 |
| Ye Jun | 1 |
| Koonmen James Patrick | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/705 | 52 |
| G03F7/70625 | 36 |
| G03F7/70633 | 30 |
| G03F7/7065 | 30 |
| G03F7/70641 | 23 |