Method and apparatus for image analysis

Patent metadata

Field	Value
Publication number	US-11720029-B2
Application number	US-202117497207-A
Country	US
Kind code	B2
Filing date	Oct 8, 2021
Priority date	Dec 9, 2014
Publication date	Aug 8, 2023
Grant date	Aug 8, 2023

Abstract

A method and apparatus of detection, registration and quantification of an image is described. The method may include obtaining an image of a lithographically created structure, and applying a level set method to an object, representing the structure, of the image to create a mathematical representation of the structure. The method may include obtaining a first dataset representative of a reference image object of a structure at a nominal condition of a parameter, and obtaining second dataset representative of a template image object of the structure at a non-nominal condition of the parameter. The method may further include obtaining a deformation field representative of changes between the first dataset and the second dataset. The deformation field may be generated by transforming the second dataset to project the template image object onto the reference image object. A dependence relationship between the deformation field and change in the parameter may be obtained.

First claim

What is claimed is:

1. A non-transitory computer program product comprising machine-readable instructions therein, the instructions, upon execution by a computer processor system, configured to cause the computer processor system to at least:
process data of a noisy inspection image containing an object representing a structure created by a semiconductor process, with one or more numerical techniques; and
obtain, based on the processing of the inspection image, a high resolution mathematical representation or numerical function corresponding to the structure, wherein the mathematical representation or numerical function is configured for a classification of a defect, for an estimation of a defect, for a monitoring of a process, and/or for a controlling of a process.

2. The computer program product of claim 1 , wherein the instructions are further configured to cause the computer processor system to binarize the mathematical representation or numerical function to obtain a dataset representing the object.

3. The computer program product of claim 2 , wherein the instructions configured to cause the computer processor system to binarize the mathematical representation or numerical function are further configured to cause the computer processor system to set a value of the mathematical representation or numerical function to a certain value for all spaces where the mathematical representation or numerical function has a value greater than zero, and set the value of the mathematical representation or numerical function to another value for all spaces where the mathematical representation or numerical function has a value less than zero.

4. The computer program product of claim 1 , wherein the instructions configured to cause the computer processor system to process the noisy inspection image are further configured to cause the computer processor system to apply a level set method to data of the noisy inspection image, the level set method comprising minimization of an energy functional via variational calculus.

5. The computer program product of claim 1 , wherein the instructions are further configured to cause the computer processor system to use the mathematical representation or numerical function to change a parameter of a process to create the structure and/or to evaluate an image comprising a plurality of structures to identify one or more instances of the particular structure in the image.

6. The computer program product of claim 1 , wherein the structure comprises a circuit feature of an integrated circuit and/or the image is a scanning electron microscope image.

7. The computer program product of claim 1 , wherein the instructions configured to cause the computer processor system to process the noisy inspection image are further configured to cause the computer processor system to evolve a curve enclosing the object subject to constraints of the object.

8. A system comprising:
an inspection apparatus configured to provide an image of a structure created by a semiconductor process; and
an image analysis engine comprising the non-transitory computer program product of claim 1 .

9. A non-transitory computer program product comprising machine-readable instructions therein, the instructions, upon execution by a computer processor system, configured to cause the computer processor system to at least:
obtain a high resolution mathematical representation or numerical function corresponding to a structure created by a semiconductor process, the mathematical representation or numerical function obtained from numerical processing of data of a noisy inspection image containing an object representing the structure; and
based on the mathematical representation or numerical function or information derived therefrom, control a process, monitor a process, classify a defect or estimate a defect.

10. The computer program product of claim 9 , wherein the instructions are further configured to cause the computer processor system to binarize the mathematical representation or numerical function to obtain a dataset representing the object.

11. The computer program product of claim 10 , wherein the instructions configured to cause the computer processor system to binarize the mathematical representation or numerical function are further configured to cause the computer processor system to set a value of the mathematical representation or numerical function to a certain value for all spaces where the mathematical representation or numerical function has a value greater than zero, and set the value of the mathematical representation or numerical function to another value for all spaces where the mathematical representation or numerical function has a value less than zero.

12. The computer program product of claim 9 , wherein the instructions are further configured to cause the computer processor system to process the noisy inspection image by applying a level set method to data of the noisy inspection image, the level set method comprising minimization of an energy functional via variational calculus.

13. The computer program product of claim 9 , wherein the structure comprises a circuit feature of an integrated circuit and/or the image is a scanning electron microscope image.

14. The computer program product of claim 9 , wherein the instructions are further configured to cause the computer processor system to process the noisy inspection image by evolving a curve enclosing the object subject to constraints of the object.

15. A system comprising:
an inspection apparatus configured to provide an image of a structure created by a semiconductor process; and
an image analysis engine comprising the non-transitory computer program product of claim 9 .

16. A method comprising:
processing, by a hardware computer, data of a noisy inspection image containing an object representing a structure created by a semiconductor process, with one or more numerical techniques; and
obtaining, based on the processing of the inspection image, a high resolution mathematical representation or numerical function corresponding to the structure, wherein the mathematical representation or numerical function is configured for a classification of a defect, for an estimation of a defect, for a monitoring of a process, and/or for a controlling of a process.

17. The method of claim 16 , further comprising binarizing the mathematical representation or numerical function to obtain a dataset representing the object.

18. The method of claim 16 , wherein processing the noisy inspection image comprises applying a level set method to data of the noisy inspection image, the level set method comprising minimization of an energy functional via variational calculus.

19. The method of claim 16 , further comprising using the mathematical representation or numerical function to change a parameter of a process to create the structure and/or to evaluate an image comprising a plurality of structures to identify one or more instances of the particular structure in the image.

20. The method of claim 16 , wherein processing the noisy inspection image comprises evolving a curve enclosing the object subject to constraints of the object.

Assignees

• Asml Netherlands Bv

Inventors

• Middlebrooks Scott Anderson
• Van Kraaij Markus Gerardus Martinus Maria
• Koopman Adrianus Cornelis Matheus
• Hunsche Stefan
• Coene Willem Marie Julia Marcel

Classifications

• G03F7/705 Primary

  Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions · CPC title

• G03F7/7065

  Defects, e.g. optical inspection of patterned layer for defects · CPC title

• G03F7/70625

  Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness · CPC title

• G03F7/70633

  Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching · CPC title

• G06T7/12

  Edge-based segmentation · CPC title