Method for deposition of conformal films with catalysis assisted low temperature CVD

Patent metadata

Field	Value
Publication number	US-9388491-B2
Application number	US-201313946012-A
Country	US
Kind code	B2
Filing date	Jul 19, 2013
Priority date	Jul 23, 2012
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

A method for depositing a film in a substrate processing system includes arranging a substrate on a pedestal in a processing chamber, heating the substrate to a temperature within a predetermined temperature range, and supplying a gas mixture to the processing chamber for a predetermined period to deposit the film on the substrate, wherein the gas mixture includes a first precursor gas, ammonia gas and diborane gas.

First claim

What is claimed is:

1. A method for depositing a conformal film in a substrate processing system, comprising:
a) arranging a substrate on a pedestal in a processing chamber;
b) heating the substrate to a temperature within a predetermined temperature range, wherein the predetermined temperature range is between 500° C. and 630° C.; and
c) supplying a gas mixture to the processing chamber for a predetermined period to deposit the conformal film on the substrate, wherein the gas mixture includes a first precursor gas, ammonia gas and diborane gas, wherein the first precursor gas has a deposition temperature of approximately 650° C., wherein the gas mixture including the diborane gas has a deposition temperature within the predetermined temperature range, and wherein a ratio of the first precursor gas to the diborane gas is between 1:0.01 and 1:0.025.

2. The method of claim 1 , further comprising:
d) purging the gas mixture after the predetermined period; and
e) repeating a) to d) one or more times.

3. The method of claim 1 , wherein the conformal film includes one of a boron nitride film, a silicon nitride film, and a boron carbide film.

4. The method of claim 1 , wherein the first precursor gas includes silane.

5. The method of claim 1 , further comprising toggling the diborane gas on and off multiple times during the predetermined period.

Assignees

• Novellus Systems Inc

Inventors

• Fox Keith

Classifications

• C23C16/345

  Silicon nitride · CPC title

• C23C16/32

  Carbides · CPC title

• C23C16/38 Primary

  Borides · CPC title

• C23C16/45523

  Pulsed gas flow or change of composition over time · CPC title

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title