Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-12564012-B2 · Feb 24, 2026 · US
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Fenwick David patents
Fenwick David is listed as an inventor on 52 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fenwick David |
| Total patents | 52 |
| First publication | Nov 2, 2017 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Multi-layer plasma resistant coating by atomic layer deposition
US-2026024730-A1 · Jan 22, 2026 · US
Protective metal oxy-fluoride coatings
US-12492464-B2 · Dec 9, 2025 · US
Hafnium aluminum oxide coatings deposited by atomic layer deposition
US-2025333843-A1 · Oct 30, 2025 · US
Hafnium aluminum oxide coatings deposited by atomic layer deposition
US-12351910-B2 · Jul 8, 2025 · US
Atomic layer deposition of protective coatings for semiconductor process chamber components
US-12104246-B2 · Oct 1, 2024 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-2024284650-A1 · Aug 22, 2024 · US
Multi-layer plasma resistant coating by atomic layer deposition
US-12002657-B2 · Jun 4, 2024 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-12004337-B2 · Jun 4, 2024 · US
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
US-11667577-B2 · Jun 6, 2023 · US
Recent patents
Latest publications not already listed above.
Protective metal oxy-fluoride coatings
US-2023141782-A1 · May 11, 2023 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-2023077895-A1 · Mar 16, 2023 · US
Protective metal oxy-fluoride coatings
US-11572617-B2 · Feb 7, 2023 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-11547030-B2 · Jan 3, 2023 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-11540432-B2 · Dec 27, 2022 · US
Atomic layer deposition of protective coatings for semiconductor process chamber components
US-2022235458-A1 · Jul 28, 2022 · US
Multi-layer plasma resistant coating by atomic layer deposition
US-2022157568-A1 · May 19, 2022 · US
Atomic layer deposition of protective coatings for semiconductor process chamber components
US-11326253-B2 · May 10, 2022 · US
Multi-layer plasma resistant coating by atomic layer deposition
US-11251023-B2 · Feb 15, 2022 · US
Atomic layer deposition of protective coatings for semiconductor process chamber components
US-11198937-B2 · Dec 14, 2021 · US
Atomic layer deposition of protective coatings for semiconductor process chamber components
US-11198936-B2 · Dec 14, 2021 · US
Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
US-2021230070-A1 · Jul 29, 2021 · US
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
US-11014853-B2 · May 25, 2021 · US
Multi-layer coating with diffusion barrier layer and erosion resistant layer
US-11008653-B2 · May 18, 2021 · US
Hafnium aluminum oxide coatings deposited by atomic layer deposition
US-2021123143-A1 · Apr 29, 2021 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-2021100087-A1 · Apr 1, 2021 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-2021100141-A1 · Apr 1, 2021 · US
Multi-layer plasma resistant coating by atomic layer deposition
US-2020185200-A1 · Jun 11, 2020 · US
Metal oxy-flouride films based on oxidation of metal flourides
US-2020140996-A1 · May 7, 2020 · US
Multi-layer plasma resistant coating by atomic layer deposition
US-10573497-B2 · Feb 25, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 52 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4404 | 33 |
| C23C16/40 | 32 |
| H01J37/32495 | 31 |
| C23C16/45525 | 29 |
| C23C16/405 | 29 |