Method and apparatus for inspection
US-12500063-B2 · Dec 16, 2025 · US
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Druzhinina Tamara patents
Druzhinina Tamara is listed as an inventor on 23 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Druzhinina Tamara |
| Total patents | 23 |
| First publication | Jul 23, 2015 |
| Latest publication | Dec 16, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for forming a patterned layer of material
US-12399428-B2 · Aug 26, 2025 · US
Method and apparatus for forming a patterned layer of material
US-12325911-B2 · Jun 10, 2025 · US
Method and apparatus for inspection
US-2024186107-A1 · Jun 6, 2024 · US
Method and apparatus for inspection
US-11875966-B2 · Jan 16, 2024 · US
Method and apparatus for forming a patterned layer of material
US-2023350301-A1 · Nov 2, 2023 · US
Method and apparatus for forming a patterned layer of material
US-2022213593-A1 · Jul 7, 2022 · US
Method and apparatus for inspection
US-2021375581-A1 · Dec 2, 2021 · US
Method and apparatus for detecting substrate surface variations
US-11092902-B2 · Aug 17, 2021 · US
Method and apparatus for inspection
US-11094502-B2 · Aug 17, 2021 · US
Recent patents
Latest publications not already listed above.
Method and apparatus for forming a patterned layer of material
US-2021079519-A1 · Mar 18, 2021 · US
Method for manufacturing a membrane assembly
US-10712656-B2 · Jul 14, 2020 · US
Clearing out method, revealing device, lithographic apparatus, and device manufacturing method
US-2020152527-A1 · May 14, 2020 · US
Method and Apparatus for Detecting Substrate Surface Variations
US-2020124977-A1 · Apr 23, 2020 · US
Methods for providing lithography features on a substrate by self-assembly of block copolymers
US-10551736-B2 · Feb 4, 2020 · US
Method to provide a patterned orientation template for a self-assemblable polymer
US-10240250-B2 · Mar 26, 2019 · US
Method and apparatus for inspection
US-2019006147-A1 · Jan 3, 2019 · US
Method of simulating formation of lithography features by self-assembly of block copolymers
US-10127336-B2 · Nov 13, 2018 · US
Method for manufacturing a membrane assembly
US-2018239240-A1 · Aug 23, 2018 · US
Methods for providing spaced lithography features on a substrate by self-assembly of block copolymers
US-9368366-B2 · Jun 14, 2016 · US
Method of simulating formation of lithography features by self-assembly of block copolymers
US-2016078160-A1 · Mar 17, 2016 · US
Methods for providing spaced lithography features on a substrate by self-assembly of block copolymers
US-2015364335-A1 · Dec 17, 2015 · US
Methods for providing lithography features on a substrate by self-assembly of block copolymers
US-2015205197-A1 · Jul 23, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 23 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/0002 | 7 |
| H01J2237/0245 | 6 |
| H01J37/023 | 6 |
| H01J37/22 | 6 |
| H01J2237/2817 | 6 |