Substrate processing method
US-12546000-B2 · Feb 10, 2026 · US
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Chun SeungJu patents
Chun SeungJu is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chun SeungJu |
| Total patents | 14 |
| First publication | Aug 31, 2017 |
| Latest publication | Feb 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing method
US-2026002264-A1 · Jan 1, 2026 · US
Substrate processing method
US-2025122617-A1 · Apr 17, 2025 · US
Substrate processing method
US-2024254619-A1 · Aug 1, 2024 · US
Substrate processing method
US-2023298930-A1 · Sep 21, 2023 · US
Method for forming silicon nitride film selectively on top/bottom portions
US-11676812-B2 · Jun 13, 2023 · US
Air gap forming method and selective deposition method
US-2023089397-A1 · Mar 23, 2023 · US
Substrate processing system
US-11530483-B2 · Dec 20, 2022 · US
Method for forming silicon nitride film selectively on top/bottom portions
US-2020321209-A1 · Oct 8, 2020 · US
Method for forming silicon nitride film selectively on top surface
US-10720322-B2 · Jul 21, 2020 · US
Recent patents
Latest publications not already listed above.
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
US-10529554-B2 · Jan 7, 2020 · US
Substrate processing system
US-2019390343-A1 · Dec 26, 2019 · US
Method for forming silicon nitride film selectively on sidewalls of trenches
US-2019057857-A1 · Feb 21, 2019 · US
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
US-2017250068-A1 · Aug 31, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6339 | 12 |
| H10P14/6336 | 12 |
| H10P14/69433 | 11 |
| H10P14/6682 | 9 |
| H01L21/0228 | 8 |