Chemical mechanical polishing cleaning system with temperature control for defect reduction
US-12543524-B2 · Feb 3, 2026 · US
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Chen Ssutzu patents
Chen Ssutzu is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen Ssutzu |
| Total patents | 4 |
| First publication | Sep 2, 2021 |
| Latest publication | Feb 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Chemical mechanical polishing cleaning system with temperature control for defect reduction
US-2023326736-A1 · Oct 12, 2023 · US
Chemical mechanical polishing cleaning system with temperature control for defect reduction
US-11694889-B2 · Jul 4, 2023 · US
Chemical mechanical polishing cleaning system with temperature control for defect reduction
US-2021272798-A1 · Sep 2, 2021 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/238 | 4 |
| H10P72/0602 | 4 |
| H10P72/0414 | 4 |
| H10P72/0412 | 4 |
| H10P70/237 | 4 |