Method of purifying target material for an EUV light source
US-11317501-B2 · Apr 26, 2022 · US
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Baumgart Peter patents
Baumgart Peter is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Baumgart Peter |
| Total patents | 10 |
| First publication | May 5, 2016 |
| Latest publication | Apr 26, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for purifying target material for euv light source
US-2020015343-A1 · Jan 9, 2020 · US
Method and apparatus for purifying target material for EUV light source
US-10455680-B2 · Oct 22, 2019 · US
Method and apparatus for purifying target material for euv light source
US-2017247778-A1 · Aug 31, 2017 · US
Method of and apparatus for supply and recovery of target material
US-9699876-B2 · Jul 4, 2017 · US
Target material supply apparatus for an extreme ultraviolet light source
US-9632418-B2 · Apr 25, 2017 · US
Apparatus for and method of supplying target material
US-9544983-B2 · Jan 10, 2017 · US
Target material supply apparatus for an extreme ultraviolet light source
US-2016274466-A1 · Sep 22, 2016 · US
Target material supply apparatus for an extreme ultraviolet light source
US-9392678-B2 · Jul 12, 2016 · US
Apparatus for and method of supplying target material
US-2016128170-A1 · May 5, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 11 |
| Cymer LLC | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05G2/002 | 10 |
| H05G2/008 | 9 |
| H05G2/005 | 5 |
| H05G2/006 | 5 |
| G03F7/70033 | 5 |