Method of purifying target material for an EUV light source

Patent metadata

Field	Value
Publication number	US-11317501-B2
Application number	US-201916572131-A
Country	US
Kind code	B2
Filing date	Sep 16, 2019
Priority date	Feb 29, 2016
Publication date	Apr 26, 2022
Grant date	Apr 26, 2022

Abstract

A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.

First claim

What is claimed is:

1. A method, comprising:
loading a target material into a crucible so that the crucible becomes a loaded crucible, the target material to be used in a droplet generator of an extreme ultraviolet (EUV) light source;
inserting the loaded crucible into a vessel and sealing the vessel;
heating the target material in the loaded crucible to create molten target material;
introducing a gas containing hydrogen into the vessel through an inlet and causing the gas containing hydrogen to flow over a free surface of the molten target material while orienting the loaded crucible at an angle relative to a horizontal plane to increase a free surface area of the molten target material;
allowing at least a portion of the gas containing hydrogen caused to flow over a free surface of the molten target material to exit the vessel through an outlet while measuring a concentration of water vapor in the at least a portion of the gas exiting the vessel; and
after a measured concentration of water vapor in the at least a portion of the gas exiting the vessel stabilizes at a predetermined level, discontinuing heating the molten target material thereby allowing the molten target material to cool.

2. The method of claim 1 , wherein the target condition comprises the measured water vapor concentration in the at least a portion of the gas exiting the vessel stabilizing at a minimum level.

3. The method of claim 1 , wherein the target material is high purity tin.

4. The method of claim 1 , wherein the gas containing hydrogen is a gas mixture comprising up to 2.93 molar % of hydrogen and the balance substantially argon.

5. The method of claim 1 , wherein the operation of heating the target material in the crucible includes:
generating a vacuum within the vessel;
once an effective vacuum condition is obtained within the vessel, heating the vessel to about 500 degrees C.; and
maintaining the vessel at about 500 degrees C. until the target material melts.

6. The method of claim 1 , wherein the operation of causing a gas containing hydrogen to flow over a free surface of the molten target material includes:
increasing the temperature within the vessel from about 500 degrees C. to about 750 degrees C. as the gas containing hydrogen flows over the free surface of the molten target material.

7. The method of claim 6 , wherein the crucible is oriented at an angle of about 12 degrees relative to the horizontal plane.

8. The method of claim 1 , wherein the operation of discontinuing heating the molten target material includes:
turning off heaters heating the vessel while maintaining flow of the gas containing hydrogen;
allowing the vessel to cool from about 750 degrees C. down to about room temperature; and
after the temperature cools down to about room temperature, stopping the flow of the gas containing hydrogen and depressurizing the vessel.

9. The method of claim 8 , wherein the operation of allowing the vessel to cool includes allowing the vessel to cool without using forced cooling.

10. The method of claim 8 , wherein the operation of allowing the vessel to cool includes using forced cooling to cool the vessel.

11. A method, comprising:
loading a quantity of target material into a crucible;
inserting the crucible into a vessel;
sealing the vessel with a closure device having a first gas passage adapted to introduce an added gas into the crucible and a second gas passage adapted to exhaust an exhaust gas from the vessel, the exhaust gas being at least partially made up of the added gas;
heating the quantity of target material in the crucible to create molten target material;
introducing the added gas into the crucible through the first gas passage in such a way as to cause the added gas to flow over a free surface of the molten target material while orienting the crucible at an angle relative to a horizontal plane to increase a free surface area of the molten target material, the added gas containing hydrogen;
measuring a concentration of water vapor in the exhaust gas exiting the vessel through the second gas passage; and
discontinuing heating of the molten target material after the measured concentration of water vapor in the second gas exiting the vessel stabilizes at a predetermined level.

12. The method of claim 11 , wherein the predetermined condition comprises stabilization of the measured water vapor concentration in the exhaust gas exiting the vessel at a minimum level.

13. The method of claim 11 , wherein the target material is tin having a purity level exceeding 99.99%.

14. The method of claim 11 , wherein the added gas is a gas mixture comprising up to 2.93 molar % of hydrogen and the balance substantially argon.

15. The method of claim 11 , wherein the operation of introducing the added gas into the crucible through the first gas passage in such a way as to cause the added gas to flow over a free surface of the molten target material includes:
increasing the temperature within the vessel from about 500 degrees C. to about 750 degrees C. as the added gas flows over the free surface of the molten target material.

Assignees

• Asml Netherlands Bv

Inventors

• Vaschenko Georgiy
• Baumgart Peter
• Rajyaguru Chirag
• Sams Benjamin
• Ridinger Armin
• Kardokus Janine

Classifications

• H05G2/008 Primary

  involving an energy-carrying beam in the process of plasma generation · CPC title

• H05G2/0035

  the material containing metals as principal radiation-generating components · CPC title

• H05G2/002 Primary

  Supply of the plasma generating material · CPC title

• C22B25/08

  Refining · CPC title

• C22B9/04

  Refining by applying a vacuum · CPC title