Method and apparatus for repairing a defect of a lithographic mask
US-12566370-B2 · Mar 3, 2026 · US
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Bauer Markus patents
Bauer Markus is listed as an inventor on 50 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Bauer Markus |
| Total patents | 50 |
| First publication | Oct 29, 2015 |
| Latest publication | Mar 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for setting a side wall angle of a pattern element of a photolithographic mask
US-12535726-B2 · Jan 27, 2026 · US
Lighting device for a motor vehicle
US-12454213-B2 · Oct 28, 2025 · US
Method, lithography mask, use of a lithography mask, and processing arrangement
US-2025208499-A1 · Jun 26, 2025 · US
Caiman ring forceps - manual hf activation
US-2025099162-A1 · Mar 27, 2025 · US
Pitch angle blocking device
US-12060149-B2 · Aug 13, 2024 · US
Cylinder of an internal combustion engine
US-11982357-B2 · May 14, 2024 · US
Method and apparatus for examining a beam of charged particles
US-11961705-B2 · Apr 16, 2024 · US
Method and apparatus for examining a measuring tip of a scanning probe microscope
US-11680963-B2 · Jun 20, 2023 · US
Method and apparatus for etching a lithography mask
US-2023185180-A1 · Jun 15, 2023 · US
Recent patents
Latest publications not already listed above.
Method and apparatus for repairing a defect of a lithographic mask
US-2023152685-A1 · May 18, 2023 · US
Method and apparatus for setting a side wall angle of a pattern element of a photolithographic mask
US-2023109566-A1 · Apr 6, 2023 · US
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
US-11372334-B2 · Jun 28, 2022 · US
Pitch angle blocking device
US-2022194570-A1 · Jun 23, 2022 · US
Method and apparatus for determining a wavefront of a massive particle beam
US-11355311-B2 · Jun 7, 2022 · US
Method and apparatus for examining a measuring tip of a scanning probe microscope
US-2022107340-A1 · Apr 7, 2022 · US
Lighting Device for a Motor Vehicle
US-2022055530-A1 · Feb 24, 2022 · US
Method and apparatus for examining a measuring tip of a scanning probe microscope
US-11237187-B2 · Feb 1, 2022 · US
Cylinder of an Internal Combustion Engine
US-2021381597-A1 · Dec 9, 2021 · US
Method and apparatus for examining a beam of charged particles
US-2021110996-A1 · Apr 15, 2021 · US
Method and apparatus for determining a wavefront of a massive particle beam
US-2020312613-A1 · Oct 1, 2020 · US
Beam reverser module and optical power amplifier having such a beam reverser module
US-10777958-B2 · Sep 15, 2020 · US
Method and control device for operation of an engine
US-10690068-B2 · Jun 23, 2020 · US
Automated adaption of a codec
US-10666711-B2 · May 26, 2020 · US
Method and apparatus for examining a measuring tip of a scanning probe microscope
US-2020141972-A1 · May 7, 2020 · US
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
US-2020096874-A1 · Mar 26, 2020 · US
Automated compression of data
US-10536501-B2 · Jan 14, 2020 · US
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
US-10534269-B2 · Jan 14, 2020 · US
Polarizer assembly for spatially separation polarization states of a light beam
US-10394041-B2 · Aug 27, 2019 · US
Cooler for use in a device in a vacuum
US-10303067-B2 · May 28, 2019 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 28 |
| Airbus Helicopters Deutschland GmbH | 6 |
| Alcatel Lucent | 5 |
| Man Energy Solutions Se | 3 |
| Man Diesel & Turbo Se | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G02B7/1815 | 8 |
| H04L67/10 | 5 |
| B64C27/50 | 5 |
| G03F1/74 | 5 |
| H01S3/10023 | 4 |