Apparatus and method for controlling a substrate temperature
US-12424421-B2 · Sep 23, 2025 · US
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Aikawa Naoya patents
Aikawa Naoya is listed as an inventor on 22 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Aikawa Naoya |
| Total patents | 22 |
| First publication | Mar 2, 2017 |
| Latest publication | Sep 23, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Stage
US-2025246454-A1 · Jul 31, 2025 · US
Stage
US-2025210408-A1 · Jun 26, 2025 · US
Sheath heater and stage
US-2025159765-A1 · May 15, 2025 · US
Heater and stage having the heater
US-12284731-B2 · Apr 22, 2025 · US
Stage, film-forming apparatus, and film-processing apparatus
US-12211710-B2 · Jan 28, 2025 · US
Polishing device, polishing method, and machine part
US-2025010425-A1 · Jan 9, 2025 · US
Temperature sensor and heater unit
US-12000737-B2 · Jun 4, 2024 · US
Placement board and placement structure
US-2024178049-A1 · May 30, 2024 · US
Heater unit
US-11490464-B2 · Nov 1, 2022 · US
Recent patents
Latest publications not already listed above.
Stage, film-forming apparatus or film-processing apparatus including the stage, and method for controlling temperature of substrate
US-2022157579-A1 · May 19, 2022 · US
Temperature sensor and heater unit
US-2022155156-A1 · May 19, 2022 · US
Heater
US-2022151031-A1 · May 12, 2022 · US
Heater and stage having the heater
US-2021235550-A1 · Jul 29, 2021 · US
Stage, film-forming apparatus, and film-processing apparatus
US-2021217638-A1 · Jul 15, 2021 · US
Heater unit
US-2020043638-A1 · Feb 6, 2020 · US
Laminate and method of fabricating laminate
US-10435792-B2 · Oct 8, 2019 · US
Substrate-placing stage and manufacturing method thereof
US-2019228953-A1 · Jul 25, 2019 · US
Heater unit
US-10290529-B2 · May 14, 2019 · US
Laminate and method of manufacturing laminate
US-2018315680-A1 · Nov 1, 2018 · US
Heater unit
US-2018226285-A1 · Aug 9, 2018 · US
Laminate and method of fabricating laminate
US-2017058406-A1 · Mar 2, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Nhk Spring Co Ltd | 22 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0432 | 16 |
| C23C16/4586 | 10 |
| C23C14/50 | 10 |
| C23C16/46 | 9 |
| H01J37/32724 | 8 |