Heater unit

Patent metadata

Field	Value
Publication number	US-10290529-B2
Application number	US-201815948473-A
Country	US
Kind code	B2
Filing date	Apr 9, 2018
Priority date	Oct 26, 2015
Publication date	May 14, 2019
Grant date	May 14, 2019

Abstract

A heater unit having high in-plane temperature uniformity is provided. A heater unit includes a first heater part, a second heater part controlled independently of the first heater part, a base arranged with a groove in a region between the first heater part and the second heater part, and a cover part arranged at an opening end of the groove and providing a closed space with the groove. In addition, an insulating layer covering the first heater part and the second heater part, and an electrostatic chuck attached to the base via the insulating layer may be further included. In addition, the closed space provided by the cover part and the groove may be a vacuum.

First claim

What is claimed is:

1. A heat unit comprising:
a first heater part;
a second heater part controlled independently of the first heater part;
a base arranged with a groove in a region between the first heater part and the second heater part; and
a lid part arranged at an opening end of the groove and providing a closed space with the groove,
wherein the lid part is located between the first heater part and the base and between the second heater part and the base.

2. The heater unit according to claim 1 , wherein the closed space is a vacuum.

3. The heater unit according to claim 1 , wherein the closed space is filled with a gas.

4. The heater unit according to claim 1 , wherein the closed space is filled with a substance having a thermal conductivity lower than a thermal conductivity of the base.

5. The heater according to claim 1 , further comprising:
an insulating layer covering the first heater part and the second heater part.

6. The heater unit according to claim 5 , wherein a part of the insulating layer between the first heater part and the second heater part is removed.

7. The heater according to claim 6 , further comprising an electrostatic chuck attached to the base via the insulating layer.

8. The heater unit according to claim 1 , wherein the groove is arranged in a line shape in a planar view.

9. The heater unit according to claim 1 , wherein the groove is arranged in a ring shape in a planar view.

10. The heater unit according to claim 7 , wherein the lid part is a ring shape in a planar view.

11. The heater unit according to claim 1 , wherein
the base has a first surface and a second surface opposite side of the first surface, and
the groove has a bottom between the first surface and the second surface.

12. The heater unit according to claim 1 , wherein
a region where the groove is located and a region where the first and second heater parts are located are divided from each other by the lid part.

Assignees

• Nhk Spring Co Ltd

Inventors

• Hanamachi Toshihiko
• Aikawa Naoya

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/0431 Primary

  Apparatus for thermal treatment · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/70

  for supporting or gripping · CPC title