Desktop electron microscope and combined round-multipole magnetic lens thereof

Patent metadata

Field	Value
Publication number	US-9343261-B2
Application number	US-201414534815-A
Country	US
Kind code	B2
Filing date	Nov 6, 2014
Priority date	Aug 8, 2014
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

A combined round-multipole magnetic lens comprises a coil bracket, a first pole piece and a second pole piece. At least a first pole shoe of the first pole piece on the coil support and at least a second pole shoe of the second pole piece under the coil support respectively extend towards the central axis. The first pole shoe and the second pole shoe are symmetric according to the central axis, or the first pole shoes and the second pole shoes are respectively symmetrically arranged, and the angle difference between the first pole shoe and the adjacent second pole shoes is 360/2N degrees. A magnetic circuit gap is formed between the first pole shoe and the adjacent second pole shoe, for generating a magnetic field distribution of multi-poles and reducing the volume and the number of power supplies.

First claim

What is claimed is:

1. A desktop electron microscope, comprising:
an electron gun, for providing an electron beam; and
at least a combined round-multipole magnetic lens, comprising:
a coil support, for winding merely one coil according to a central axis, the center of the coil support having a central opening portion for the electron beam passing through the central opening portion;
a first pole piece, adjacently disposed at an upper-side of the coil support, having a first opening portion corresponding to the central opening portion of the coil support and a plurality of first pole shoes, the first pole shoes extending from an inner edge of the first opening portion to the central axis, wherein each of the plurality of first pole shoes has a first extending portion and a first ending portion, the first extending portion extends downward from the inner edge of the first opening portion, the first ending portion is connected with the inner edge of the first opening portion of the first pole piece through the first extending portion; and
a second pole piece, adjacently disposed at an under-side of the coil support, having a second opening portion corresponding to the central opening portion of the coil support and a plurality of second pole shoes, the second pole shoes extending from an inner edge of the second opening portion to the central axis, each of the plurality of second pole shoes has a second extending portion and a second ending portion, the second extending portion extends upward from the inner edge of the second opening portion, the second ending portion is connected with the inner edge of the second opening portion of the second pole piece through the second extending portion, wherein the first ending portion and the second ending portion are located in the same horizontal plane, and the horizontal plane is perpendicular to the central axis;
wherein the number of the first pole shoes and the number of the second pole shoes is N respectively, N is an integer larger than one, the plurality of first pole shoes are symmetrically arranged according to the central axis, the plurality of second pole shoes are symmetrically arranged according to the central axis, each first pole shoe and the adjacent second pole shoe differ from each other at an angle according to the central axis, and the angle is 360/2N degrees;
wherein each first pole shoe and the adjacent second pole shoe form a magnetic-circuit gap, wherein when the coil is fed with an electric current, the first pole shoe, the corresponding magnetic-circuit gap and the second pole shoe form a first magnetic circuit.

2. The desktop electron microscope according to claim 1 , wherein the combined round-multipole magnetic lens further comprises:
a permanent magnet, forming an annular structure according to the central axis, the permanent magnet disposed at the outer side of the coil away from the central axis, and located between the first pole piece and the second pole piece.

3. The desktop electron microscope according to claim 1 , wherein the first opening portion of the first pole piece and the second opening portion of the second pole piece form a second magnetic circuit when the coil is fed with the electric current.

Assignees

• Nat Univ Tsing Hua

Inventors

• Chang Wei-Yu
• Chen Fu-Rong
• Lee Te-Hui
• Huang Tsu-Wei

Classifications

• H01J37/1413

  Means for interchanging parts of the lens, e. g. pole pieces within the tube · CPC title

• H01J37/153 Primary

  Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• H01J37/141

  Electromagnetic lenses · CPC title

• H01J2237/141

  Coils · CPC title