Multipole and charged particle radiation apparatus using the same

Patent metadata

Field	Value
Publication number	US-9343260-B2
Application number	US-201214000236-A
Country	US
Kind code	B2
Filing date	Feb 29, 2012
Priority date	Mar 30, 2011
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

In order to realize a multiple assembled easily with high accuracy, a multipole having assembly accuracy within 10 micrometer and within several seconds of angle is achieved by fixing multipole elements by being guided by grooves provided on an inner side of a cylindrical housing to form the multipole.

First claim

The invention claimed is:

1. A multipole comprising a plurality of multipole elements, multipole members including the plurality of multipole elements arranged integrally with a rod, and a cylindrical housing having an opening at a center portion therethrough so as to allow a charged particle radiation to pass therethrough,
wherein the cylindrical housing includes a plurality of grooves parallel to a direction of an optical axis on a circumference of an inner wall of the opening, and the multipole members are arranged so that each multipole element in each multipole member is fitted into one of the plurality of grooves, and
wherein one or more multipole elements included in the plurality of multipole members are arranged at a portion of the cylindrical housing such that said one or more multipole elements do not come into contact with the cylindrical housing.

2. The multipole according to claim 1 ,
wherein the plurality of multipole elements are formed to have a multistage formed on the rod at predetermined intervals so that distal end portions thereof are oriented in the same direction, the cylindrical housing is provided with the grooves at both end portions of the inner wall of the opening, the thickness of the inner wall at an intermediate portion of the cylindrical housing is formed to be thinner than the thickness of the inner wall of the both end portions, the multipole members are fixed to the cylindrical housing between the grooves and the multipole elements at the both end portions from among the multistage multipole elements formed on the rod.

3. The multipole according to claim 2 , wherein the multipole elements are formed by using a soft magnetic metal material or a soft magnetic metal material and a no-magnetic metal material, and the multipole members fixedly arrange the plurality of multipole elements at predetermined intervals parallel to the optical axis with insulating members interposed therebetween.

4. The multipole according to claim 3 ,
wherein the insulating members are formed of alumina, and a method of fixing the multipole elements to the rod is brazing.

5. A chromatic and spherical aberration corrector comprising:
the multipole according to claim 3 and an outer magnetic path,
wherein the multipole forms a magnetic path by being connected with the outer magnetic path via shafts having coils wound thereon.

6. The chromatic and spherical aberration corrector according to claim 5 ,
wherein multistage multipole having four or more stages are used.

7. A charged particle radiation apparatus comprising:
the chromatic and spherical aberration corrector according to claim 5 mounted in a vacuum atmosphere.

8. The charged particle radiation apparatus according to claim 7 ,
wherein the chromatic and spherical aberration corrector includes multistage multipole having four or more stages.

9. The multipole according to claim 2 ,
wherein multistage multipole elements having four or more stages are used.

Assignees

• Urano Kotoko
• Kawasaki Takeshi
• Moriya Noboru
• Nakano Tomonori
• Hitachi High Tech Corp

Inventors

• Urano Kotoko
• Kawasaki Takeshi
• Moriya Noboru
• Nakano Tomonori

Classifications

• H01J2237/1534

  Aberrations · CPC title

• H01J37/153 Primary

  Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators · CPC title