Apparatus having a magnetic lens configured to diverge an electron beam

Patent metadata

Field	Value
Publication number	US-9390882-B2
Application number	US-201414171357-A
Country	US
Kind code	B2
Filing date	Feb 3, 2014
Priority date	Oct 29, 2007
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

Apparatus having a magnetic lens configured to diverge an electron beam are useful in three-dimensional imaging using an electron microscope. The magnetic lens includes a body member having a core and defining a gap, and a winding surrounding a portion of the core. The body member and winding are configured such that an electrical current through the winding produces a magnetic field proximate to the gap.

First claim

What is claimed is:

1. An apparatus comprising:
a magnetic lens configured to diverge an electron beam, the magnetic lens comprising:
a body member comprising a solid cylindrical core within the body member, and defining a gap surrounding the solid cylindrical core; and
a winding within the body member and surrounding a portion of the solid cylindrical core;

wherein the body member and winding are configured such that an electrical current through the winding produces a magnetic field proximate to the gap; and
wherein the solid cylindrical core is solid extending from an axis of the solid cylindrical core to an outer radius of the solid cylindrical core.

2. The apparatus of claim 1 , wherein the body member is a rotationally symmetric body member.

3. The apparatus of claim 2 , wherein the rotationally symmetric body member is a circular body member.

4. The apparatus of claim 1 , wherein the solid cylindrical core is centered within the body member.

5. The apparatus of claim 1 , wherein the gap is parallel to the longitudinal axis of the electron beam.

6. The apparatus of claim 1 , wherein the magnetic lens is configured to be placed co-axially to the electron beam.

7. The apparatus of claim 1 , wherein the magnetic lens is configured to correct spherical and chromatic aberrations.

8. The apparatus of claim 1 , wherein the magnetic lens is configured to diverge a hollow-cone electron beam.

9. The apparatus of claim 1 , wherein the body member comprises a ferromagnetic substance.

10. The apparatus of claim 1 , wherein the ferromagnetic substance comprises iron.

11. The apparatus of claim 1 , wherein the body member is electrically grounded.

12. The apparatus of claim 1 , wherein the gap is an air gap.

13. An apparatus comprising:
a magnetic lens configured to diverge a hollow-cone electron beam around an exterior of the magnetic lens at a particular radius from a center of the magnetic lens, the magnetic lens comprising:
a ferromagnetic body member comprising a ferromagnetic core and defining a gap surrounding the ferromagnetic core at the particular radius of the magnetic lens; and
an electrical coil wound around the ferromagnetic core and contained between the particular radius of the magnetic lens and the ferromagnetic core;
wherein the ferromagnetic body member and the electrical coil wound around the ferromagnetic core are configured such that an electrical current through the electrical coil produces a magnetic field proximate to the gap; and
wherein the hollow-cone electron beam does not travel through the core.

14. The apparatus of claim 13 , wherein the body member is a rotationally symmetric body member, and wherein the core is centered within the rotationally symmetric body member.

15. The apparatus of claim 13 , wherein the gap is parallel to the longitudinal axis of the electron beam.

16. The apparatus of claim 13 , wherein the ferromagnetic body member comprises iron.

17. The apparatus of claim 13 , wherein the body member is electrically grounded.

18. An apparatus comprising:
a magnetic lens configured to diverge an electron beam placed co-axially to the magnetic lens, the magnetic lens comprising:
a rotationally symmetric body member comprising a core having an outer radius, and defining a gap between two annular portions of the rotationally symmetric body member, the two annular portions having inner and outer radii each greater than the outer radius of the core; and
a winding surrounding a portion of the core and located within the rotationally symmetric body member in a space between the outer radius of the core and the inner radius of each of the two annular portions;
wherein the rotationally symmetric body member is configured to be placed co-axially to the electron beam; and
wherein the rotationally symmetric body member and winding are configured such that an electrical current through the winding produces a magnetic field proximate to the gap; and
wherein the electron beam does not travel through the core.

19. The apparatus of claim 18 , wherein the core is centered within the rotationally symmetric body member.

20. The apparatus of claim 18 , wherein the magnetic lens is configured to diverge a hollow-cone electron beam placed co-axially to the magnetic lens.

21. The apparatus of claim 18 , wherein the body member comprises a ferromagnetic substance.

22. The apparatus of claim 18 , wherein the body member is electrically grounded.

Assignees

• Micron Technology Inc

Inventors

• Wang Shixin

Classifications

• H01J2237/1405

  Constructional details · CPC title

• H01J2237/045

  Diaphragms · CPC title

• H01J2237/0492

  Lens systems · CPC title

• H01J37/153

  Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators · CPC title

• H01J2237/1534

  Aberrations · CPC title