Treatment liquid for semiconductor with ruthenium and method of producing the same
US-2021388508-A1 · Dec 16, 2021 · US
for etching other metallic material
for etching other metallic material · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23F1/40 |
| Official title | for etching other metallic material |
| Display label | for etching other metallic material |
| Total patents | 134 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2015 | 8 |
| 2016 | 12 |
| 2017 | 10 |
| 2018 | 7 |
| 2019 | 9 |
| 2020 | 11 |
| 2021 | 10 |
| 2022 | 19 |
| 2023 | 14 |
| 2024 | 16 |
| 2025 | 15 |
| 2026 | 3 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Etching solution for tungsten and GST films
US-11035044-B2 · Jun 15, 2021 · US
Method of producing die, die, and interior component of vehicle
US-10954601-B2 · Mar 23, 2021 · US
Chemical solution, method for manufacturing chemical solution, and method for treating substrate
US-2020354632-A1 · Nov 12, 2020 · US
Connection terminal and method for producing connection terminal
US-10804632-B2 · Oct 13, 2020 · US
Ruthenium removal composition and method of producing magnetoresistive random access memory
US-2020295258-A1 · Sep 17, 2020 · US
Ruthenium removal composition and method of producing magnetoresistive random access memory
US-10714682-B2 · Jul 14, 2020 · US
Ruthenium etching composition and method
US-2020190673-A1 · Jun 18, 2020 · US
Etching solution, method for processing object to be processed, and method for manufacturing semiconductor element
US-2020190672-A1 · Jun 18, 2020 · US
Etching composition, method for forming pattern and method for manufacturing a display device using the same
US-2020148951-A1 · May 14, 2020 · US
Connection terminal and method for producing connection terminal
US-2020036125-A1 · Jan 30, 2020 · US
Coating method for clad steel and coating solution for coating clad steel
US-10538851-B2 · Jan 21, 2020 · US
Composition for cleaning mask and method for cleaning mask using the same
US-2020017978-A1 · Jan 16, 2020 · US
Substrate treatment method and substrate treatment apparatus
US-10529588-B2 · Jan 7, 2020 · US
Etching solution composition
US-2019323129-A1 · Oct 24, 2019 · US
Nanostructure, method of preparing the same, and panel units comprising the nanostructure
US-10438715-B2 · Oct 8, 2019 · US
Bulk ruthenium chemical mechanical polishing composition
US-2019300750-A1 · Oct 3, 2019 · US
Compositions and methods for selectively etching titanium nitride
US-10392560-B2 · Aug 27, 2019 · US
Coating method for clad steel and coating solution for coating clad steel
US-2019203372-A1 · Jul 4, 2019 · US
Ruthenium removal composition and method of producing magnetoresistive random access memory
US-2019148634-A1 · May 16, 2019 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23F1/40?
- CPC C23F1/40 is the Cooperative Patent Classification code for “for etching other metallic material.”
- How many patents are filed under CPC C23F1/40 (for etching other metallic material)?
- Our database includes 134 publications tagged with this CPC code.
- Is patent activity under CPC C23F1/40 growing?
- Publication counts under this code: 16 in 2024 vs 15 in 2025 (latest complete years).