Substrate processing apparatus, raw material cartridge, substrate processing method, and raw material cartridge manufacturing method
US-12529138-B2 · Jan 20, 2026 · US
using a porous body
using a porous body · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C16/4483 |
| Official title | {using a porous body} |
| Display label | using a porous body |
| Total patents | 51 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is rapidly declining.
| Year | Patents |
|---|---|
| 2015 | 5 |
| 2016 | 6 |
| 2017 | 4 |
| 2018 | 4 |
| 2019 | 7 |
| 2020 | 1 |
| 2021 | 8 |
| 2022 | 3 |
| 2023 | 4 |
| 2024 | 5 |
| 2025 | 3 |
| 2026 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Vaporizer and vaporizing system
US-2025108351-A1 · Apr 3, 2025 · US
Precursor delivery vessel, precursor delivery system, and precursor deposition apparatus
US-2025034703-A1 · Jan 30, 2025 · US
Semiconductor chemical precursor with gas passages
US-2025027199-A1 · Jan 23, 2025 · US
Precursor container
US-12146218-B2 · Nov 19, 2024 · US
Precursor supply unit, substrate processing system, and method of fabricating semiconductor device using the same
US-11959170-B2 · Apr 16, 2024 · US
Precursor container
US-2024084449-A1 · Mar 14, 2024 · US
Capacitive sensor system for precursor level measurement and method therefor
US-2024035872-A1 · Feb 1, 2024 · US
Precursor container
US-11873558-B2 · Jan 16, 2024 · US
Device and method for evaporating an organic powder
US-2023220553-A1 · Jul 13, 2023 · US
Vapor delivery systems for solid and liquid materials
US-11661653-B2 · May 30, 2023 · US
Film-forming material mixed-gas forming device and film forming device
US-11639548-B2 · May 2, 2023 · US
Precursor container
US-2023076675-A1 · Mar 9, 2023 · US
Substrate processing apparatus, raw material cartridge, substrate processing method, and raw material cartridge manufacturing method
US-2022411929-A1 · Dec 29, 2022 · US
Substrate processing apparatus, processing gas concentrating apparatus, and substrate processing method
US-2022372623-A1 · Nov 24, 2022 · US
Vapor phase epitaxial growth device
US-11371165-B2 · Jun 28, 2022 · US
Vapor phase epitaxial growth device
US-2021310154-A1 · Oct 7, 2021 · US
Precursor supply unit, substrate processing system, and method of fabricating semiconductor device using the same
US-2021292900-A1 · Sep 23, 2021 · US
Modular tray ampoule
US-11104993-B2 · Aug 31, 2021 · US
Precursor supply unit, substrate processing system, and method of fabricating semiconductor device using the same
US-11047045-B2 · Jun 29, 2021 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C16/4483?
- CPC C23C16/4483 is the Cooperative Patent Classification code for “using a porous body.”
- How many patents are filed under CPC C23C16/4483 (using a porous body)?
- Our database includes 51 publications tagged with this CPC code.
- Is patent activity under CPC C23C16/4483 growing?
- Publication counts under this code: 5 in 2024 vs 3 in 2025 (latest complete years).