Method of purifying target material for an EUV light source
US-11317501-B2 · Apr 26, 2022 · US
Refining by applying a vacuum · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C22B9/04 |
| Official title | Refining by applying a vacuum |
| Display label | Refining by applying a vacuum |
| Total patents | 93 |
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2015 | 4 |
| 2016 | 12 |
| 2017 | 11 |
| 2018 | 8 |
| 2019 | 9 |
| 2020 | 7 |
| 2021 | 7 |
| 2022 | 7 |
| 2023 | 8 |
| 2024 | 9 |
| 2025 | 10 |
| 2026 | 1 |
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
US-11317501-B2 · Apr 26, 2022 · US
US-2022018000-A1 · Jan 20, 2022 · US
US-2021381082-A1 · Dec 9, 2021 · US
US-2021332463-A1 · Oct 28, 2021 · US
US-11136680-B2 · Oct 5, 2021 · US
US-11059088-B2 · Jul 13, 2021 · US
US-11059089-B2 · Jul 13, 2021 · US
US-2021102272-A1 · Apr 8, 2021 · US
US-2021102271-A1 · Apr 8, 2021 · US
US-10829834-B2 · Nov 10, 2020 · US
US-2020299803-A1 · Sep 24, 2020 · US
US-2020239979-A1 · Jul 30, 2020 · US
US-10632436-B2 · Apr 28, 2020 · US
US-10633717-B2 · Apr 28, 2020 · US
US-10551124-B2 · Feb 4, 2020 · US
US-2020015343-A1 · Jan 9, 2020 · US
US-2019366414-A1 · Dec 5, 2019 · US
US-10494698-B1 · Dec 3, 2019 · US
US-2019338431-A1 · Nov 7, 2019 · US
US-10455680-B2 · Oct 22, 2019 · US
Answers are generated from the same data shown on this page.