Method for manufacturing a microelectromechanical structure and microelectromechanical structure
US-11975964-B2 · May 7, 2024 · US
Etching
Etching · Cooperative Patent Classification (CPC)
Separating, mixing, shaping, printing, and transporting materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | B81C2201/013 |
| Official title | Etching |
| Display label | Etching |
| Total patents | 574 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 12 |
| 2016 | 65 |
| 2017 | 84 |
| 2018 | 71 |
| 2019 | 69 |
| 2020 | 64 |
| 2021 | 40 |
| 2022 | 29 |
| 2023 | 46 |
| 2024 | 38 |
| 2025 | 47 |
| 2026 | 9 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Method of forming capacitive mems sensor devices
US-2016363609-A1 · Dec 15, 2016 · US
Cmos-mems integrated device including a contact layer and methods of manufacture
US-2016362296-A1 · Dec 15, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016355392-A1 · Dec 8, 2016 · US
Heating system and method for microfluidic and micromechanical applications
US-2016347610-A1 · Dec 1, 2016 · US
Stress relief MEMS structure and package
US-9499393-B2 · Nov 22, 2016 · US
CMOS ultrasonic transducers and related apparatus and methods
US-9499392-B2 · Nov 22, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9493341-B2 · Nov 15, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9493343-B2 · Nov 15, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016325986-A1 · Nov 10, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016325983-A1 · Nov 10, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016325982-A1 · Nov 10, 2016 · US
Microelectromechanical systems (mems) structure to prevent stiction after a wet cleaning process
US-2016318753-A1 · Nov 3, 2016 · US
Chip Package and a Method of Producing the Same
US-2016311679-A1 · Oct 27, 2016 · US
Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a mems element
US-2016304336-A1 · Oct 20, 2016 · US
Capacitive MEMS sensor devices
US-9470710-B2 · Oct 18, 2016 · US
Microfluid delivery device and method for manufacturing the same
US-9469109-B2 · Oct 18, 2016 · US
Microelectromechanical system device with internal direct electric coupling
US-9452920-B2 · Sep 27, 2016 · US
Mems-based speaker implementation
US-2016277845-A1 · Sep 22, 2016 · US
Inertial sensor with nested seismic masses and method for manufacturing such a sensor
US-2016273916-A1 · Sep 22, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC B81C2201/013?
- CPC B81C2201/013 is the Cooperative Patent Classification code for “Etching.”
- How many patents are filed under CPC B81C2201/013 (Etching)?
- Our database includes 574 publications tagged with this CPC code.
- Is patent activity under CPC B81C2201/013 growing?
- Publication counts under this code: 38 in 2024 vs 47 in 2025 (latest complete years).