Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
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Endo Takafumi — Physics
Endo Takafumi holds 4 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Endo Takafumi |
| Technology | Physics |
| Patents in slice | 4 |
| Recent patents in slice | 1 |
| First year | 2015 |
| Last year | 2023 |
Representative patents
Notable publications linking Endo Takafumi to Physics.
Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
Composition for forming resist underlayer film with reduced outgassing
US-10437150-B2 · Oct 8, 2019 · US
Composition for forming resist underlayer film with reduced outgassing
US-10437150-B2 · Oct 8, 2019 · US
Recent filings
Latest patents from Endo Takafumi in Physics.
Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
Composition for forming resist underlayer film with reduced outgassing
US-10437150-B2 · Oct 8, 2019 · US
Composition for forming resist underlayer film with reduced outgassing
US-10437150-B2 · Oct 8, 2019 · US
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