Substrate mounting mechanism, and substrate processing apparatus
US-9202728-B2 · Dec 1, 2015 · US
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Taga Satoshi patents in 2015
Taga Satoshi was listed as an assignee on 3 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Taga Satoshi |
| Year | 2015 |
| Patents | 3 |
Patents
Representative publications for Taga Satoshi in 2015.
Top CPC classifications
Most common classification codes for Taga Satoshi in 2015.
| CPC | Patents |
|---|---|
| C23C16/4586 | 2 |
| H01L21/67109 | 2 |
| H10P72/0434 | 2 |
| C23C16/16 | 1 |
| C23C16/4404 | 1 |
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