Hybrid carbon hardmask for lateral hardmask recess reduction

Patent metadata

Field	Value
Publication number	US-9991118-B2
Application number	US-201715398591-A
Country	US
Kind code	B2
Filing date	Jan 4, 2017
Priority date	Jan 20, 2016
Publication date	Jun 5, 2018
Grant date	Jun 5, 2018

Abstract

Implementations of the present disclosure relate to improved hardmask materials and methods for patterning and etching of substrates. A plurality of hardmasks may be utilized in combination with patterning and etching processes to enable advanced device architectures. In one implementation, a first hardmask and a second hardmask disposed on a substrate having various material layers disposed thereon. The second hardmask may be utilized to pattern the first hardmask during a first etching process. A third hardmask may be deposited over the first and second hardmasks and a second etching process may be utilized to form channels in the material layers.

First claim

What is claimed is:

1. A substrate processing method, comprising:
depositing a first hardmask on one or more material layers disposed on a substrate;
depositing a second hardmask on the first hardmask;
patterning the second hardmask;
performing a first etching process to etch the first hardmask and the second hardmask;
conformally depositing a third hardmask over the one or more material layers, the first hardmask, and the second hardmask, wherein the third hardmask comprises a boron doped carbonaceous material composed of greater than about 25 wt % boron and about 50 wt % carbon; and
performing a second etching process to etch the one or more material layers to form channels in the one or more material layers.

2. The method of claim 1 , wherein the one or more material layers include silicon nitride materials and silicon oxide materials.

3. The method of claim 2 , wherein the silicon nitride materials and the silicon oxide materials are deposited in alternating layers to form a layer stack.

4. The method of claim 3 , wherein the layer stack has greater than about 48 material layers.

5. The method of claim 1 , wherein the first hardmask is a carbon containing material.

6. The method of claim 5 , wherein the first hardmask is deposited to a thickness of between about 1 μm and about 2 μm.

7. The method of claim 1 , wherein the second hardmask is a dielectric material.

8. The method of claim 7 , wherein the dielectric material is a silicon containing material.

9. The method of claim 8 , wherein the silicon containing material is a silicon dioxide material, a silicon nitride material, a silicon oxynitride material, or combinations thereof.

10. The method of claim 7 , wherein the second hardmask is deposited to a thickness of between about 50 μm and about 200 μm.

11. The method of claim 1 , wherein the first etching process is a plasma etching process using fluorocarbon precursors.

12. The method of claim 1 , wherein the third hardmask is conformally deposited to a thickness of between about 5 nm and about 15 nm.

13. The method of claim 1 , wherein the boron doped carbonaceous material is a borocarbonitride material which includes nitrogen.

14. The method of claim 13 , wherein at least about 80 atomic % of the borocarbonitride material is formed from boron, carbon, and nitrogen.

15. The method of claim 14 , wherein the borocarbonitride material is deposited by a thermal chemical vapor deposition process using dimethylamine borane as a precursor.

16. A substrate processing method, comprising:
depositing a first hardmask on one or more oxide and nitride containing material layers disposed on a substrate;
depositing a second hardmask on the first hardmask;
performing a first etching process to etch the first hardmask and the second hardmask;
conformally depositing a borocarbonitride hardmask over the one or more oxide and nitride containing material layers, the first hardmask, and the second hardmask; and
performing a second etching process to etch the one or more oxide and nitride containing material layers to form channels in the one or more oxide and nitride containing material layers, wherein the second etching process is a plasma based etching process using precursors selected from the group consisting of CH 4 , N 2 , O 2 , and a fluorine-rich precursor.

17. The method of claim 16 , wherein the second etching process removes the second hardmask and the third hardmask.

18. A substrate processing method, comprising:
depositing a carbonaceous hardmask on one or more oxide and nitride containing material layers disposed on a substrate;
depositing a silicon containing dielectric hardmask on the carbonaceous hardmask;
performing a first etching process to etch the carbonaceous hardmask and the silicon containing dielectric hardmask;
conformally depositing a borocarbonitride hardmask over the one or more oxide and nitride containing material layers, the carbonaceous hardmask, and the silicon containing dielectric hardmask; and
performing a second etching process to etch the one or more oxide and nitride containing material layers to form channels in the one or more oxide and nitride containing material layers, wherein the second etching process is a plasma based etching process using precursors selected from the group consisting of CH 4 , N 2 , O 2 , and a fluorine-rich precursor.

19. The method of claim 18 , wherein an etch rate of the oxide and nitride containing material layers during the second etching process is about 3.5 to about 4.0 times greater than an etch rate of the borocarbonitride hardmask.

Assignees

• Applied Materials Inc

Inventors

• Kwon Thomas Jongwan
• Cheng Rui
• Mallick Abhijit Basu
• Ping Er-Xuan
• Ahn Jaesoo

Classifications

• H10P14/6902

  composed of carbon, e.g. alpha-C, diamond or hydrogen doped carbon · CPC title

• H10P14/6334

  using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329) · CPC title

• H10P14/66

  characterised by the type of materials · CPC title

• H10P76/4085

  characterised by the processes involved to create the masks · CPC title

• H10P76/4083

  characterised by their behaviours during the lithography processes, e.g. soluble masks or redeposited masks · CPC title