Substrate holding apparatus and substrate cleaning apparatus

Patent metadata

Field	Value
Publication number	US-9558971-B2
Application number	US-201414309287-A
Country	US
Kind code	B2
Filing date	Jun 19, 2014
Priority date	Jun 24, 2013
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

A substrate holding apparatus capable of reducing an amount of deflection of a substrate, such as a wafer, is disclosed. The substrate holding apparatus includes: a plurality of chucks configured to hold a peripheral edge of a substrate; at least one support member disposed below the substrate; and an actuating device configured to bring the chucks into contact with the peripheral edge of the substrate while elevating the support member to bring the support member into contact with a lower surface of the substrate, and configured to move the chucks in a direction away from the peripheral edge of the substrate while lowering the support member to separate the support member away from the lower surface of the substrate.

First claim

What is claimed is:

1. A substrate holding apparatus comprising:
a plurality of chucks configured to hold a peripheral edge of a substrate;
at least one support member disposed below the substrate; and
an actuating device configured to bring the chucks into contact with the peripheral edge of the substrate while elevating the support member to bring the support member into contact with a lower surface of the substrate, and configured to move the chucks in a direction away from the peripheral edge of the substrate while lowering the support member to separate the support member away from the lower surface of the substrate.

2. The substrate holding apparatus according to claim 1 , wherein the at least one support member comprises a plurality of support members disposed around a center of the substrate.

3. The substrate holding apparatus according to claim 2 , wherein the chucks and the support members are arranged alternately along a circumferential direction of the substrate.

4. The substrate holding apparatus according to claim 1 , wherein the actuating device comprises:
a first spring configured to move the chucks until the chucks contact the peripheral edge of the substrate;
a second spring configured to elevate the support member to bring the support member into contact with the lower surface of the substrate; and
an actuator configured to move the chucks in the direction away from the peripheral edge of the substrate while lowering the support member away from the lower surface of the substrate.

5. The substrate holding apparatus according to claim 1 , further comprising:
a rotating device configured to rotate the chucks and the support member about an axis of the substrate.

6. A substrate cleaning apparatus comprising:
a plurality of chucks configured to hold a peripheral edge of a substrate;

at least one support member disposed below the substrate;
an actuating device configured to bring the chucks into contact with the peripheral edge of the substrate while elevating the support member to bring the support member into contact with a lower surface of the substrate, and configured to move the chucks in a direction away from the peripheral edge of the substrate while lowering the support member to separate the support member away from the lower surface of the substrate;
a cleaning liquid supply nozzle configured to supply a cleaning liquid onto the substrate when held by the substrate holding apparatus; and
a cleaning tool configured to scrub the substrate in the presence of the cleaning liquid.

7. The substrate holding apparatus according to claim 1 , further comprising:
support posts having substrate support surfaces on which the substrate can be placed.

8. The substrate holding apparatus according to claim 7 , further comprising:
support shafts which rotatably support the chucks, respectively, the support shafts being supported by the support posts.

Assignees

• Ebara Corp

Inventors

• Miyazaki Mitsuru
• Inoue Takuya

Classifications

• H10P72/76

  using mechanical means, e.g. clamps or pinches · CPC title

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0412 Primary

  using mainly scrubbing means, e.g. brushes · CPC title

• H01L21/67046 Primary

  Electricity · mapped topic